Abstract: A modular chemical delivery block is presented. In an embodiment, the modular chemical delivery block is a top-accessible modular block. A top-accessible modular block is one that may be coupled to or decoupled from an adjacent modular block using access from directly above the top-accessible modular block. The top-accessible modular chemical delivery block preferably includes an axial connection location configured to allow the modular block to be coupled to a laterally adjacent modular block. The interior surface of the axial connection location is preferably substantially parallel to the exterior surface of the axial connection location and unobstructed by other portions of the modular block from the top surface of the modular block. Another embodiment involves a unified modular block configured to direct multi-directional fluid flow therethrough. The unified modular block preferably includes first and second fluid flow paths having first and second axial bore holes.

Abstract: An apparatus for mechanically connecting modular chemical delivery substrate blocks in single layer and/or multiple lower layer configurations via axial and intermediate locations in such a way that all joint locations (including mounting fixtures to a rigid mechanism for mounting purposes) are completely accessible from the top surface of the assembly for fastening or unfastening the joints of the blocks. A design using the method of the present invention and incorporating current semiconductor standards (such as SEMI 2787) dictates specific mechanical dimensions and fastener localities in order to be properly implemented. Use of this top access fastener design results in minimal numbers of substrate joints in a chemical delivery system being affected when removing any one block from the system.

Abstract: Modular chemical delivery substrate blocks which have both directional and transverse flow direction capabilities united in a single modular substrate block and which utilize localized fastener substrate joining techniques unique to such a design. The design, which incorporates current semiconductor industry standards (such as SEMI 2787.1), dictates specific mechanical dimensional constraints and bolt joining localities that are also presented herein. Likewise, the mechanical features and constraints specific to attaching other direct chemical process flow substrate blocks to such unified multidirectional flow blocks are described. Use of this united multi-flow block design results in fewer seals and fasteners required to provide multi-directional flow regimes, reduces the total chemical wetted volume of the chemical delivery streams, minimizes modular chemical delivery system stacking height, and reduces system weight.