Patents by Inventor J. Randall Kurie

J. Randall Kurie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5108574
    Abstract: A rotating cylindrical sputtering target surface as part of a magnetron has cylindrical shields adjacent each end of the target to prevent arcing that undesirably occurs when certain materials are being sputtered, particularly dielectrics. If two or more rotating targets are employed in a single magnetron system, each is similarly shielded. In a preferred form, the target is provided with a single cylindrical shield that is cut away for a significant portion of the distance around the cylinder to provide an opening through which a sputtering region of the target is accessible, while maintaining shielding of the target end regions. This preferred shield is rotatable in order to allow the position of the sputtering activity to be selected.
    Type: Grant
    Filed: January 29, 1991
    Date of Patent: April 28, 1992
    Assignee: The BOC Group, Inc.
    Inventors: Milan R. Kirs, Abraham I. Belkind, J. Randall Kurie, Zoltan Orban, Carolynn Boehmler