Abstract: Method (and apparatus) for producing a 3D target structure in lithographic material. Focus region of a laser writing beam travels through a scanning manifold through the lithographic material. In the focus region of the laser writing beam, an exposure dose is irradiated into the lithographic material, and a structure region is locally defined. At least one exposure data set which represents a local exposure dose for the scan manifold as a function of location is determined. A structure which approximates the target structure is defined based on at least one exposure data set. This structure is analyzed and at least one analysis data set which represents the analyzed structure is determined. Deviation data set which represents deviations of the already defined structure from the target structure is determined. At least one correction exposure data set is determined. Correction structure based on the at least one correction exposure data set is defined.

Abstract: Method (and apparatus) for producing a 3D target structure in lithographic material. Focus region of a laser writing beam travels through a scanning manifold through the lithographic material. In the focus region of the laser writing beam, an exposure dose is irradiated into the lithographic material, and a structure region is locally defined. At least one exposure data set which represents a local exposure dose for the scan manifold as a function of location is determined. A structure which approximates the target structure is defined based on at least one exposure data set. This structure is analyzed and at least one analysis data set which represents the analyzed structure is determined. Deviation data set which represents deviations of the already defined structure from the target structure is determined. At least one correction exposure data set is determined. Correction structure based on the at least one correction exposure data set is defined.

Abstract: The invention relates to an apparatus and a process for the data communication between a system unit (8) and technical facilities (2, 3, 4) in buildings for the flexible and convenient parameterization and remote monitoring of the facilities (2, 3, 4), an existing communication infrastructure being usable to reduce the expenditure resulting from cabling and to enable cost-effective data communication. The apparatus comprises a system unit (8) which is suited for data transmission according to a first data transmission protocol, at least one facility (2, 3, 4) which is suited for data transmission according to a second data transmission protocol, a protocol converter (1) which is connected to system unit (8) and converts data of the first data transmission protocol into data of the second data transmission protocol and vice versa, and a bus system (5) to which the facilities (2, 3, 4) and the protocol converter (1) can be connected.

Abstract: The invention relates to a spindle motor comprising a casing part with a horizontal flange portion and a vertically oriented receiving sleeve for receiving and fastening a corresponding bearing configuration. According to the invention a bottom portion, integrally connected with the horizontal flange portion, is provided, which unilaterally closes the receiving sleeve. Consequently, the mounting of a separate cover for closing the receiving sleeve can be omitted.

Abstract: The invention related to a spindle motor for hard disk drives with improved running accuracy where the sheet metal package or the complete stator consisting of sheet metal package and windings is encompassed by a centering casing of plastic, which is preferably applied by means of an injection molding operation. Depending on the design of the spindle motor the centering casing can be centered on the stationary shaft and/or on the outer rings/inner raceways pertaining to the sets of roolling bodies. Furthermore, a stator without centering casing is described whose sheet metal package is centered directly on the outer rings/inner raceways.

Abstract: The invention relates to a spindle motor having a sealing support film which prevents exchange of air between the interior and surroundings of the spindle motor. In spindle motors for hard disk drives it is extremely important to construct the spindle motor so that it is sealed tight against the external environment, ie so that from the connecting side of the spindle motor no admission of air to the interior of the spindle motor can occur. A further characteristic of the invention consists in that the support film is bonded and fixed in place in sealing manner by means of an adhesive which does not give off gas or does so only very slightly.

Abstract: A spindle-drive motor for hard drives having a baseplate, a shaft and one or more bearings for rotational mounting of a rotationally driven rotor, with at least one magnetic fluid seal arranged between the stationary part and the rotating part of the spindle-drive motor. The seal is formed of an upper and a lower yoke lamination and a magnet disk arranged between the yoke laminations, where a concentric chamber is formed so that it is open toward the inside on one side to hold a magnetically conducting fluid. A flux concentrating lamination extends into this chamber. In one embodiment of this invention, the flux concentrating lamination is in direct or indirect contact with one end face of the inner bearing ring of the bearing, while the outer part of the magnetic fluid seal is in direct or indirect contact with the end face of the outer bearing ring of the bearing.

Abstract: The invention relates to a product having a substrate of a partially stabilized zirconium oxide and a buffer layer of a fully stabilized zirconium oxide. In this case, the substrate is untextured and the buffer layer is biaxially textured and joined to the substrate via an interlayer which consists is made of a material that is different than zirconium oxide but is compatible with the latter. This product is in particular produced with ion beam-assisted deposition of the buffer layer. It is suitable in particular as a support for a functional layer of a ceramic superconductor, e.g. for use as a superconducting current limiter.