Abstract: In vapor deposition applications, especially OLED mass production, where it is necessary to measure and/or control the deposition rate of evaporation sources within specific tolerances, a measurement system is adapted to use robust and accurate optical thickness measurement methods at high and low rate sources, so that the thickness of a layer deposited on a substrate can be measured and controlled. A first evaporation source (11) deposits a layer of material on a substrate (20). A mobile element (41) is provided, On which a film is deposited from a second evaporation source (12b) in a deposition location (D1). Subsequently the mobile element is conveyed to a measurement location (D2) where the thickness of the film is measured by a thickness detector (45). The measurement apparatus is arranged to control the deposition of the first evaporation source in dependence on the thickness of the film deposited on the mobile element.

Abstract: In vapour deposition applications, especially OLED mass production, where it is necessary to measure and/or control the deposition rate of evaporation sources within specific tolerances, a measurement system is adapted to use robust and accurate optical thickness measurement methods at high and low rate sources, so that the thickness of a layer deposited on a substrate can be measured and controlled. A first evaporation source (11) deposits a layer of material on a substrate (20). A mobile element (41) is provided, On which a film is deposited from a second evaporation source (12b) in a deposition location (D1). Subsequently the mobile element is conveyed to a measurement location (D2) where the thickness of the film is measured by a thickness detector (45). The measurement apparatus is arranged to control the deposition of the first evaporation source in dependence on the thickness of the film deposited on the mobile element.

Abstract: A light emitting device includes a stack of layers having a basic layer, a first electrode layer and a second electrode layer. An organic light-emitting layer is sandwiched between the first and second electrode layers. At least one shunt element has a connection-end and a free-end. The connection-end is connected with one of the electrode layers, and the free-end is jutting out of the stack of layers.

Abstract: The invention relates to a light emitting device (10), comprising a stack of layers (15) comprising a basic layer (20), a first electrode layer (30) and a second electrode layer (40), wherein an organic light-emitting layer (50) is sandwiched between the first (30) and the second electrode layer (40), with at least one shunt element (60,60?), comprising a connection-end (65) and a free-end (66), wherein the connection-end (65) is connected with one of the electrode layers (30,40), and wherein the free-end (66) is jutting out of the stack of layers (15). The invention further relates to a method to manufacture such a device.