Patents by Inventor Jürgen MULTERER

Jürgen MULTERER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for supporting a rotatable target and sputtering apparatus
    Patent number: 8623184
    Abstract: It is provided a device for supporting a rotatable target of a deposition apparatus for sputtering material onto a substrate, wherein the device includes a drive unit for rotating the rotatable target; a ring-shaped part connected to the drive unit for attaching the drive unit to the rotatable target; and, a shield for covering the ring-shaped part. The shield is adapted for rotating together with the ring-shaped part and includes a plurality of parts assembled together. Furthermore, a sputtering apparatus and a method for supporting a rotatable target are provided.
    Type: Grant
    Filed: February 2, 2011
    Date of Patent: January 7, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Frank Schnappenberger, Jürgen Multerer
  • DEVICE FOR SUPPORTING A ROTATABLE TARGET AND SPUTTERING APPARATUS
    Publication number: 20120193218
    Abstract: It is provided a device for supporting a rotatable target of a deposition apparatus for sputtering material onto a substrate, wherein the device includes a drive unit for rotating the rotatable target; a ring-shaped part connected to the drive unit for attaching the drive unit to the rotatable target; and, a shield for covering the ring-shaped part. The shield is adapted for rotating together with the ring-shaped part and includes a plurality of parts assembled together. Furthermore, a sputtering apparatus and a method for supporting a rotatable target are provided.
    Type: Application
    Filed: February 2, 2011
    Publication date: August 2, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Frank SCHNAPPENBERGER, Jürgen MULTERER