Patents by Inventor J. S. Chen

J. S. Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6026837
    Abstract: The present invention provides an automated chemical drain system which includes a buffer tank for collecting used chemical from a process machine, at least two level sensors in the buffer tank for sensing a fluid level and sending out a signal, a controller for receiving the signal from the level sensors and then sending out a second signal to a solenoid controlled valve when the first signal exceeds a threshold value, a solenoid controlled valve that is in fluid communication with the buffer tank and a collection tank, and a collection tank for collecting used chemical from the buffer tank. The collection tank may further be provided with a weight sensing device such that a signal may be sent out to the controller when the weight of the collection tank exceeds a maximum allowable value so that the controller shuts off the solenoid controlled valve to avoid overflow in the collection tank and to alert a maintenance operator to empty the collection tank.
    Type: Grant
    Filed: May 14, 1997
    Date of Patent: February 22, 2000
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: J. S. Chen
  • Patent number: D318311
    Type: Grant
    Filed: October 28, 1988
    Date of Patent: July 16, 1991
    Inventor: J. S. Chen