Abstract: A chamber apparatus comprises a lower and an upper chamber body, and a gasket member. The lower chamber body defines a receiving region and a first receiving groove. The upper chamber body disposed above the lower chamber body and defines a second receiving groove projectively align to the first receiving groove. The second receiving groove is configured to establish sealing coupling with the lower chamber body so as to form a chamber enclosure region. The gasket member includes a conductive member and an elastomeric member. The conductive member configured to laterally surround the receiving region and respectively fit into the lower chamber body and the upper chamber body. The elastomeric member is protruded from the conductive member and extended toward the receiving region, configured to be compressed by the upper and the lower chamber body so as to seal the chamber enclosure region.

Abstract: A plasma processing system has been disclosed. The plasma processing system includes an electrostatic chuck (ESC) and an edge ring assembly. The edge ring assembly has a conductive ring configured to generate an electric field to adjust the direction of ions.

Abstract: A chamber apparatus comprises a lower and an upper chamber body, and a gasket member. The lower chamber body defines a receiving region and a first receiving groove. The upper chamber body disposed above the lower chamber body and defines a second receiving groove projectively align to the first receiving groove. The second receiving groove is configured to establish sealing coupling with the lower chamber body so as to form a chamber enclosure region. The gasket member includes a conductive member and an elastomeric member. The conductive member configured to laterally surround the receiving region and respectively fit into the lower chamber body and the upper chamber body. The elastomeric member is protruded from the conductive member and extended toward the receiving region, configured to be compressed by the upper and the lower chamber body so as to seal the chamber enclosure region.

Abstract: A plasma processing system has been disclosed. The plasma processing system includes an electrostatic chuck (ESC) and an edge ring assembly. The edge ring assembly has a conductive ring configured to generate an electric field to adjust the direction of ions.

Abstract: A control method of a washing machine determines the amount of laundry placed in a drum, verifies whether the measured amount of laundry is accurate, and sets control data in the washing machine based on the verified amount of laundry. Also the control method of the washing machine corrects control data set according to the amount of laundry based on kind of the laundry classified according to absorptance of the laundry.

Abstract: A method of manufacturing a semiconductor device is disclosed. In the method, a substrate having a first surface and a second surface is provided. The second surface is opposed to the first surface. A via hole is formed to penetrate the substrate from the first surface toward the second surface. The via hole includes a first portion and a second portion. The first portion has a first sidewall which is substantially perpendicular to the first surface. The second portion has a second sidewall which gradually decreases from the first surface toward the second surface, and has a bottom surface that substantially flat. A seed pattern is formed on the first sidewall of the first portion, the second sidewall of the second portion and the bottom surface of the second portion of the via hole. A first thickness (Vt) of the seed pattern on the first sidewall of the first portion is less than a second thickness (VIt) of the seed pattern on the second sidewall of the second portion.

Abstract: A method of manufacturing a semiconductor device is disclosed. In the method, a substrate having a first surface and a second surface is provided. The second surface is opposed to the first surface. A via hole is formed to penetrate the substrate from the first surface toward the second surface. The via hole includes a first portion and a second portion. The first portion has a first sidewall which is substantially perpendicular to the first surface. The second portion has a second sidewall which gradually decreases from the first surface toward the second surface, and has a bottom surface that substantially flat. A seed pattern is formed on the first sidewall of the first portion, the second sidewall of the second portion and the bottom surface of the second portion of the via hole. A first thickness (Vt) of the seed pattern on the first sidewall of the first portion is less than a second thickness (VIt) of the seed pattern on the second sidewall of the second portion.

Abstract: A washing machine and a method of controlling a washing machine are provided. The washing machine may include a drum in which laundry is provided and is rotated. The drum may operate at a first speed such that part of the laundry tumbles within the drum and another part of the laundry adheres to the drum. An unbalance amount or a first speed operation time of the drum, which is detected when the drum operates at the first speed, may be determined. When an abnormality occurs, rotation of the drum may stop or decelerate. Accordingly, at the time of a dehydration cycle, stability of the washing machine and laundry balancing can be ensured.

Abstract: A washing machine and a method of controlling the washing machine may be provided. The washing machine may include a drum in which laundry are provided and rotated. A laundry amount may be sensed. The drum may operate at a first speed so that a part of the laundry tumbles within the drum and another part of the laundry adheres to the drum or the drum operates at a second speed so that the laundry adheres to the drum according to the sensed laundry amount. Accordingly, at a time of a dehydration cycle, stability of the washing machine and a laundry balancing can be ensured.

Abstract: The present invention discloses a clogging detecting system for a dryer which can display a clogging degree or state of an air passage to the user through a remote controlling device. The clogging detecting system for the dryer includes the dryer for judging the clogging degree of the air passage, and sending the clogging degree to a remote controlling device, and the remote controlling device for receiving the clogging degree from the dryer, and displaying the clogging degree through a display unit.

Abstract: A washing machine and a method of controlling the washing machine are provided. According to the washing machine and method of controlling the washing machine, the drum is operated at a first speed so that part of laundry within the drum tumbles and another part of the laundry adheres to the drum. When an unbalance amount of the drum operating at the first speed is a first specific value or less, the speed of the drum is increased to a second speed so that all of the laundry adheres to the drum. When an unbalance amount of the drum detected during the increasing to the second speed is a second specific value or more, the rotation of the drum is decelerated. Accordingly, at a time of a dehydration cycle, stability of the washing machine and laundry balancing can be ensured.

Abstract: The present invention relates to a washing machine and a method of controlling the washing machine. According to a washing machine and a method of controlling the washing machine in accordance with the present invention, a drum operates at a first speed so that part of the laundry tumbles within the drum and another part of the laundry adheres within the drum. The drum operates at a second speed lower than the first speed so that an amount of the tumbling laundry is more increased than at the first speed. Accordingly, at the time of a dehydration cycle, stability of the washing machine and laundry balancing can be ensured.

Abstract: An object of the invention is to provide a laser line-generator that generates a straight line with the both end portions as bright as the central portion, and a laser line-generator module that integrates the laser line-generator with a laser light source. A columnar transparent medium has an entrance boundary surface 10 for taking in laser light and an exit surface 20 for emitting the taken laser light linearly. At least one of the entrance boundary surface 10 and the exit surface 20 is composed of a curved surface, and a curve forming the curved surface includes two or more inflection points F.

Abstract: A washing machine and a method of controlling a washing machine are provided. A drum may be rotated from a stopped state to a specific angle less than 180 degrees. While the drum is rotated, a laundry amount may be sensed based on a current value of a motor that rotates the drum. The laundry amount may be sensed simply and accurately.

Abstract: A method for controlling an automatic dryer is disclosed, which can determine a dryness level based on information relating the laundry by an initial average value of a sensing means, to thereby achieve stability and reliability in a drying process, the method comprising sensing whether the amount of laundry is small or large by using an average output value in a preset time period of an initial drying stage; detecting a saturation voltage generating point of the sensor; and performing a drying cycle based on each dryness level by using information for the amount of laundry and the saturation voltage generating point.

Abstract: A control method of a washing machine determines the amount of laundry placed in a drum, verifies whether the measured amount of laundry is accurate, and sets control data in the washing machine based on the verified amount of laundry. Also the control method of the washing machine corrects control data set according to the amount of laundry based on kind of the laundry classified according to absorptance of the laundry.

Abstract: The present invention relates to a washing machine and a method of controlling the washing machine. According to a washing machine and a method of controlling the washing machine in accordance with the present invention, a drum operates at a first speed so that part of the laundry tumbles within the drum and another part of the laundry adheres to the drum. The laundry amount within the drum is sensed during the first speed operation. Operation commands for driving the drum after the first speed operation are changed based on the sensed laundry amount. Accordingly, at the time of the dehydration cycle, stability of the washing machine and laundry balancing can be ensured.

Abstract: The present invention relates to a washing machine and a method of controlling a washing machine. According to the washing machine and the method of controlling the washing machine in accordance with the present invention, the drum is operated at a first speed so that laundry tumbles within the drum. A laundry amount within the drum during the first speed operation is sensed. The drum is driven at a second speed so that part of the laundry tumbles within the drum and another part of the laundry adheres to the drum. Operation commands for driving the drum subsequent to the first speed operation are changed based on the sensed laundry amount. Accordingly, at the time of a dehydration cycle, stability of the washing machine and laundry balancing can be ensured.

Abstract: A clogging detecting apparatus for a dryer is provided that checks and displays a clogging degree of an air passage. The clogging detecting apparatus includes a judgment device for judging the clogging degree of the air passage, a storing device for storing the clogging degree of the air passage, and a display for displaying the clogging degree to the user. The clogging detecting apparatus provides information on the clogging degree, so that the user precisely checks the state of the air passage.

Abstract: Disclosed is a network control system for home appliances that satisfies the characteristics of low-cost and high-efficiency with respect to currently used appliances adopting a low-performance microcomputer. The system is constructed to define a master/slave type communication structure with respect to the respective appliances; construct a network by connecting the appliances through the serial communication function; and enable the appliances to communicate with one another if a predetermined communication event is produced. According to the system, an optimized network for the home appliances can be implemented, and operation states of the respective appliances can be displayed through the co-operation among the appliances, thereby maximizing the user convenience.