Abstract: A method for registering a wireless device by a terminal in a wireless communication system is provided. The method includes obtaining connection information for the wireless device by scanning a recognition code of the wireless device in a first mode, transitioning to a second mode based on the connection information and receiving a connection request from the wireless device, performing a connection operation to the wireless device to transmit network access information to the wireless device, and transitioning to the first mode, and registering the wireless device upon detecting connection of the wireless device to a network in the first mode.

Abstract: A semiconductor manufacturing equipment may include a process chamber for treating a substrate; a front-end module including a first transfer robot, wherein the first transfer robot may be configured to transport the substrate received in a container; a transfer chamber between the front-end module and the process chamber, wherein the transfer chamber may be configured to load or unload the substrate into or out of the process chamber; and a cassette capable of receiving a replaceable component capable of being used in the process chamber. The front-end module may include a seat plate configured to move in a sliding manner so as to retract or extend into or from the front-end module. The cassette may be configured to be loaded into the front-end module while the cassette is seated on the seat plate.

Abstract: A dialyzer control apparatus includes a magnetic field generator which is disposed on an outer surface of a dialyzer which removes wastes from a blood flowing therein and generates a magnetic field; and a controller which controls the magnetic field generator to perform a magnetic field stimulation on the blood flowing into the dialyzer. The magnetic field stimulation may be a stimulation related to the improvement of the Rouleaux formation for the red blood cells in the blood.

Abstract: A sensor device includes: a sensor panel including sensors arranged in a matrix form and sensor lines electrically connected to the sensors one-to-one; and a sensor driver configured to receive sensing signals from the sensors through the sensor lines, wherein the sensor driver is configured to simultaneously receive a first sensing signal from a first sensor using a first reference signal and a second sensing signal from a second sensor using a second reference signal, wherein the first reference signal and the second reference signal have a same waveform, a phase of the second reference signal is different from a phase of the first reference signal, and wherein a phase of the second sensing signal is different from a phase of the first sensing signal.

Abstract: A substrate processing apparatus includes a process chamber having a substrate input port, a support disposed in the process chamber and on which a substrate is mounted, an inner edge ring disposed adjacent to the support and having a smaller width than that of the substrate input port, and an outer edge ring disposed adjacent to the inner edge ring and having a greater width than that of the substrate input port.

Abstract: A the dialyzer control apparatus includes a magnetic field generator which is disposed on an outer surface of a dialyzer which removes wastes from a blood flowing therein and generates a magnetic field; and a controller which controls the magnetic field generator to perform a magnetic field stimulation on the blood flowing into the dialyzer. The magnetic field stimulation may be a stimulation related to the improvement of the Rouleau formation for the red blood cells in the blood.

Abstract: A substrate processing apparatus includes a process chamber having a substrate input port, a support disposed in the process chamber and on which a substrate is mounted, an inner edge ring disposed adjacent to the support and having a smaller width than that of the substrate input port, and an outer edge ring disposed adjacent to the inner edge ring and having a greater width than that of the substrate input port.

Abstract: A lift pin assembly includes a lift pin having a first longitudinal axis substantially parallel with a first direction, a pin connection block combined with a lower end portion of the lift pin and including a first guide recess in a lower end portion of the pin connection block, the first guide recess extending in a second direction substantially perpendicular to the first direction, and a lift pin holder having a second longitudinal axis substantially parallel with the first direction and including a first sliding portion to be received movably in the second direction within the first guide recess by an eccentricity distance of the second longitudinal axis from the first longitudinal axis when the lift pin holder is connected to the lower end portion of the pin connection block.

Abstract: A first edge ring is removed from a substrate support within a process module using a transfer robot. The transfer robot is then used to place a second edge ring on the substrate support. An image sensor (e.g., a disk-shaped wireless image sensor) is positioned over the second edge ring using the transfer robot. The image sensor generates image information, which is analyzed to determine alignment of the second edge ring.

Abstract: A first edge ring is removed from a substrate support within a process module using a transfer robot. The transfer robot is then used to place a second edge ring on the substrate support. An image sensor (e.g., a disk-shaped wireless image sensor) is positioned over the second edge ring using the transfer robot. The image sensor generates image information, which is analyzed to determine alignment of the second edge ring.

Abstract: A lift pin assembly includes a lift pin having a first longitudinal axis substantially parallel with a first direction, a pin connection block combined with a lower end portion of the lift pin and including a first guide recess in a lower end portion of the pin connection block, the first guide recess extending in a second direction substantially perpendicular to the first direction, and a lift pin holder having a second longitudinal axis substantially parallel with the first direction and including a first sliding portion to be received movably in the second direction within the first guide recess by an eccentricity distance of the second longitudinal axis from the first longitudinal axis when the lift pin holder is connected to the lower end portion of the pin connection block.

Abstract: A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.

Abstract: A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.

Abstract: A method and apparatus of acquiring a plurality of focal spots for X-rays. The method includes radiating an electron beam from a cathode of a magnetic field generating apparatus toward a movable anode of the magnetic field generating apparatus, and irradiating a target with an X-ray that is produced from the radiated electron beam by the anode. The anode comprises an inclined side in which a part of the inclined side protrudes, and the plurality of focal spots for X-rays are acquired based on the radiated electron beam and the inclined side.

Abstract: Disclosed herein are a robot actuator and a humanoid robot having the same. The robot actuator includes a rotation driving source, a ball screw member including a ball screw part connected to the rotation driving source and a nut part connected to the ball screw part, a guide member separated in parallel from the ball screw part, a slider member movably supported by the guide member, and a connection member connecting the slider member and the nut part to move the slider member in connection with movement of the nut part, and the connection member is relatively movably connected to at least one of the nut part and the slider member. Therefore, efficiency in force reflection and back-drivability of the actuator is improved.

Abstract: A robot has a structure in which finger joints do not interfere with each other. The robot includes a first actuator driving the finger joint, a first power transmission, a second actuator driving the finger joint, and a second power transmission. The first actuator and the first power transmission are coupled with a wrist joint so that the position of the first actuator and the first power transmission is changed. Accordingly, even if the wrist joint operates, the distance between the first actuator and the finger joint is constantly maintained.

Abstract: A robot hand may have an improved structure so that movements of some of joints of a finger structure do not influence operations of other joints. A meta phalangeal (MP) roll joint unit rotated in a roll direction and an MP pitch joint unit rotated in a pitch direction of an MP joint unit are separately arranged to form an offset. Movable angles of the respective joint units are widened, and the joint units are precisely controlled. Overall friction within the robot hand is reduced, and a robot having the hand is stabilized.

Abstract: Disclosed is a humanoid robot capable of improving power transmission efficiency of a wire and movement displacement of a wrist joint by modifying the structure of the wrist joint serving as a passage for wires. The humanoid robot includes a robot hand including a power transmission device for transferring gripping force to finger members. The power transmission device includes connection members connecting an actuator to finger joints and guide members for guiding the connection members. The guide members include a first guide member coupled to a robot arm and a second guide member coupled to a hand body. The connection members are alternately wound around the first and second guide members. The gripping force is enhanced whereby a length of the connection members provided between the first and second guide members is constantly maintained even if the second guide member is shifted from the first guide member.

Abstract: Disclosed are a robot, a robot hand, and a method of controlling the robot hand, in which the robot hand rapidly and correctly approaches an object to be gripped and safely grips the object regardless of the shape and material of the object. The method of controlling a robot hand, which has a palm, and a plurality of fingers, each having a plurality of segments, connected to the palm, includes causing the palm to approach an object using at least one first distance sensor installed on the palm; causing the plurality of fingers to approach the object using at least one second distance sensor installed on the plurality of fingers; and causing the palm and the plurality of fingers to come into contact the object to grip the object.

Abstract: Disclosed is a compliant joint achieving passive compliance. The compliant joint includes a housing and a rotating member mutually rotatably provided; and a cam provided between the housing and the rotating member, and connected to the housing and the rotating member respectively. The cam is connected to the rotating member to rotate together with the rotation of the rotating member, or be independent of the rotating member so as to move in the axial direction of the rotating member separately from the rotating member. The cam is connected to the housing such that the cam can maintain the connection with the housing when external force below a designated value is applied to the rotating member, and release the connection with the housing in the case that external force more than the designated value is applied to the rotating member.