Patents by Inventor Jaakko Makela

Jaakko Makela has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11923236
    Abstract: A method for forming a semiconductor structure comprising a silicon-on-insulator layer structure with crystalline silicon oxide SiOx as the insulator material comprises: providing a crystalline silicon substrate having a substantially clean deposition surface in a vacuum chamber; heating the silicon substrate to an oxidation temperature To in the range of 550 to 1200 ° C.; supplying, while keeping the silicon substrate in the oxidation temperature, with an oxidation pressure Po in the range of 1·10?8 to 1·10?4 mbar in the vacuum chamber, molecular oxygen O2 into the vacuum chamber with an oxygen dose Do in the range of 0.1 to 1000 Langmuir; whereby a crystalline silicon oxide layer with a thickness of at least two molecular layers is formed within the silicon substrate, between a crystalline silicon base layer and a crystalline silicon top layer. Related semiconductor structures are described.
    Type: Grant
    Filed: September 12, 2022
    Date of Patent: March 5, 2024
    Assignee: TURUN YLIOPISTO
    Inventors: Pekka Laukkanen, Mikhail Kuzmin, Jaakko Mäkelä, Marjukka Tuominen, Marko Punkkinen, Antti Lahti, Kalevi Kokko, Juha-Pekka Lehtiö
  • Patent number: 11646193
    Abstract: A method for forming a foreign oxide or foreign nitride layer (6) on a substrate (1) of a semiconductor comprises providing a semiconductor substrate (1) having an oxidized or nitridized surface layer (3), supplying a foreign element (5) on the oxidized or nitridized surface layer; and keeping the oxidized or nitridized surface layer (3) at an elevated temperature so as to oxidize or nitridize at least partially the foreign element by the oxygen or nitrogen, respectively, initially present in the oxidized or nitridized surface layer (3).
    Type: Grant
    Filed: December 9, 2019
    Date of Patent: May 9, 2023
    Assignee: TURUN YLIOPISTO
    Inventors: Mikhail Kuzmin, Pekka Laukkanen, Yasir Muhammad, Marjukka Tuominen, Johnny Dahl, Veikko Tuominen, Jaakko Makela, Marko Punkkinen, Kalevi Kokko
  • Patent number: 11615952
    Abstract: A method for forming a foreign oxide or foreign nitride layer (6) on a substrate (1) of a semiconductor comprises providing a semiconductor substrate (1) having an oxidized or nitridized surface layer (3), supplying a foreign element (5) on the oxidized or nitridized surface layer; and keeping the oxidized or nitridized surface layer (3) at an elevated temperature so as to oxidize or nitridize at least partially the foreign element by the oxygen or nitrogen, respectively, initially present in the oxidized or nitridized surface layer (3).
    Type: Grant
    Filed: February 17, 2016
    Date of Patent: March 28, 2023
    Assignee: TURUN YLIOPISTO
    Inventors: Mikhail Kuzmin, Pekka Laukkanen, Yasir Muhammad, Marjukka Tuominen, Johnny Dahl, Veikko Tuominen, Jaakko Makela, Marko Punkkinen, Kalevi Kokko
  • Publication number: 20230005786
    Abstract: A method for forming a semiconductor structure comprising a silicon-on-insulator layer structure with crystalline silicon oxide SiOx as the insulator material comprises: providing a crystalline silicon substrate having a substantially clean deposition surface in a vacuum chamber; heating the silicon substrate to an oxidation temperature To in the range of 550 to 1200 ° C.; supplying, while keeping the silicon substrate in the oxidation temperature, with an oxidation pressure Po in the range of 1·10?8 to 1·10?4 mbar in the vacuum chamber, molecular oxygen O2 into the vacuum chamber with an oxygen dose Do in the range of 0.1 to 1000 Langmuir; whereby a crystalline silicon oxide layer with a thickness of at least two molecular layers is formed within the silicon substrate, between a crystalline silicon base layer and a crystalline silicon top layer. Related semiconductor structures are described.
    Type: Application
    Filed: September 12, 2022
    Publication date: January 5, 2023
    Applicant: Turun yliopisto
    Inventors: Pekka LAUKKANEN, Mikhail Kuzmin, Jaakko Mäkelä, Marjukka Tuominen, Marko Punkkinen, Antti Lahti, Kalevi Kokko, Juha-Pekka Lehtio
  • Patent number: 11443977
    Abstract: A method (100) for forming a semiconductor structure (200) comprising a silicon-on-insulator layer structure with crystalline silicon oxide SiOx as the insulator material comprises: providing (120) a crystalline silicon substrate (201) having a substantially clean deposition surface (202) in a vacuum chamber; heating (130) the silicon substrate to an oxidation temperature To in the range of 550 to 1200, 550 to 1000, or 550 to 850° C.; supplying (140), while keeping the silicon substrate in the oxidation temperature, with an oxidation pressure Po in the range of 1·10?8 to 1·10?4 mbar in the vacuum chamber, molecular oxygen O2 into the vacuum chamber with an oxygen dose Do in the range of 0.1 to 1000 Langmuir; whereby a crystalline silicon oxide layer (204) with a thickness of at least two molecular layers is formed within the silicon substrate, between a crystalline silicon base layer (203) and a crystalline silicon top layer (205).
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: September 13, 2022
    Assignee: TURUN YLIOPISTO
    Inventors: Pekka Laukkanen, Mikhail Kuzmin, Jaakko Mäkelä, Marjukka Tuominen, Marko Punkkinen, Antti Lahti, Kalevi Kokko, Juha-Pekka Lehtiö
  • Publication number: 20200111662
    Abstract: A method for forming a foreign oxide or foreign nitride layer (6) on a substrate (1) of a semiconductor comprises providing a semiconductor substrate (1) having an oxidized or nitridized surface layer (3), supplying a foreign element (5) on the oxidized or nitridized surface layer; and keeping the oxidized or nitridized surface layer (3) at an elevated temperature so as to oxidize or nitridize at least partially the foreign element by the oxygen or nitrogen, respectively, initially present in the oxidized or nitridized surface layer (3).
    Type: Application
    Filed: December 9, 2019
    Publication date: April 9, 2020
    Applicant: Turun Yliopisto
    Inventors: Mikhail KUZMIN, Pekka LAUKKANEN, Yasir MUHAMMAD, Marjukka TUOMINEN, Johnny DAHL, Veikko TUOMINEN, Jaakko MAKELA, Marko PUNKKINEN, Kalevi KOKKO
  • Publication number: 20200105576
    Abstract: A method (100) for forming a semiconductor structure (200) comprising a silicon-on-insulator layer structure with crystalline silicon oxide SiOx as the insulator material comprises: providing (120) a crystalline silicon substrate (201) having a substantially clean deposition surface (202) in a vacuum chamber; heating (130) the silicon substrate to an oxidation temperature To in the range of 550 to 1200, 550 to 1000, or 550 to 850° C.; supplying (140), while keeping the silicon substrate in the oxidation temperature, with an oxidation pressure Po in the range of 1·10?8 to 1·10?4 mbar in the vacuum chamber, molecular oxygen O2 into the vacuum chamber with an oxygen dose Do in the range of 0.1 to 1000 Langmuir; whereby a crystalline silicon oxide layer (204) with a thickness of at least two molecular layers is formed within the silicon substrate, between a crystalline silicon base layer (203) and a crystalline silicon top layer (205).
    Type: Application
    Filed: May 30, 2018
    Publication date: April 2, 2020
    Applicant: Turun yliopisto
    Inventors: Pekka LAUKKANEN, Mikhail KUZMIN, Jaakko MÄKELÄ, Marjukka TUOMINEN, Marko PUNKKINEN, Antti LAHTI, Kalevi KOKKO, Juha-Pekka LEHTIÖ
  • Publication number: 20180218901
    Abstract: A method for forming a foreign oxide or foreign nitride layer (6) on a substrate (1) of a semiconductor comprises providing a semiconductor substrate (1) having an oxidized or nitridized surface layer (3), supplying a foreign element (5) on the oxidized or nitridized surface layer; and keeping the oxidized or nitridized surface layer (3) at an elevated temperature so as to oxidize or nitridize at least partially the foreign element by the oxygen or nitrogen, respectively, initially present in the oxidized or nitridized surface layer (3).
    Type: Application
    Filed: February 17, 2016
    Publication date: August 2, 2018
    Applicant: Turun Yliopisto
    Inventors: Mikhail KUZMIN, Pekka LAUKKANEN, Yasir MUHAMMAD, Marjukka TUOMINEN, Johnny DAHL, Veikko TUOMINEN, Jaakko MAKELA, Marko PUNKKINEN, Kalevi KOKKO
  • Publication number: 20040177400
    Abstract: The present invention provides constructs and methods for increasing the content of selected amino acids by targeted expression or accumulation of a protein enriched with an amino acid sequence entailing said protein in a plant species or in a tissue or an organ of a plant. The increased content is obtained by stable transformation of plants with a recombinant nucleotide sequence construct encoding a carrier protein having in its 3′-terminal end a polyamino acid extension and operably linked with a tissue or an organ specific regulatory sequence. The increased amino acid content in plant tissues, particularly membraneous oil bodies and cell walls of seed provides a composition useful as animal feed.
    Type: Application
    Filed: February 27, 2004
    Publication date: September 9, 2004
    Inventors: Tony Mikaer Wahlroos, Josif Grigorievieh Atabekov, Yurii Leonidivich Dorokhov, Petri Eerik Susi, Mauri Jaakko Makela, Timo Kalevi Korpela
  • Patent number: 6287415
    Abstract: Arrangement in a soda recovery boiler, comprising normal melt chutes (6) for removing molten salt from the recovery boiler (1). The recovery boiler (1) comprises an outlet (8), mounted in the wall of the recovery boiler such that it is situated lower down than the normal melt chutes (6), in which case the molten salt can be removed from the bottom of the recovery boiler substantially through the outlet (8), when the recovery boiler (1) is emptied for maintenance or the like.
    Type: Grant
    Filed: August 31, 2000
    Date of Patent: September 11, 2001
    Assignee: Kvaerner Pulping Oy
    Inventors: Kalle Salmi, Jaakko Mäkelä, Aki Hakulinen, Tuomo Ruohola
  • Patent number: 5658137
    Abstract: A rotator includes an axle and an associated rotor component having lamellar vanes. A case component surrounds the rotor component. Chambers arranged symmetrically in relation to the axle are disposed between the lamellar vanes. These chambers are pressurized by oil fed through feed and outlet openings connected to the chambers. Bearing members are arranged in an axial direction on both sides of the rotor component. A conical bearing carries the axial rotor load and is formed by a conical arrangement of juxtaposed surfaces defined by the case and axle. The case includes channels leading from the chambers to the conical surfaces for communicating pressurized oil thereamong. The conical arrangement includes spaced gaskets. Oil pressure applied between the conical surfaces raises the axle off the case. In the absence of oil pressure, the conical surfaces lock as a result of friction between the case and axle.
    Type: Grant
    Filed: January 16, 1996
    Date of Patent: August 19, 1997
    Inventor: Jaakko Makela