Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Abstract: A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals.

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Abstract: A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) arranged in a V-shape which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals.

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Abstract: A mechanism for reducing radial offset in a collimnated optical beam associated with an angled end fiber and minimizing an angular offset caused by collimator lens centration errors is presented. An angled end fiber is oriented in a supporting collimator so that the angled surface of the fiber is parallel to the collimator axis, thereby compensating for the radial offset. The angled end fiber is again so oriented after the angular-offset producing collimator lens rotation (used to determine the optical center of the lens) and the collimator lens is moved in a direction parallel to the collimator axis to provide a desired output focal position for the lens.

Abstract: A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals.

Abstract: A fiber optic switch includes a fiber optic switching module that receives and fixes ends of optical fibers. The module includes numerous reflective light beam deflectors which may be selected as pairs for coupling a beam of light between a pair of optical fibers. The module also produces orientation signals from each deflector which indicate its orientation. A portcard included in the switch supplies drive signals to the module for orienting at least one deflector. The portcard also receives the orientation signals produced by that deflector together with coordinates that specify an orientation for the deflector. The portcard compares the received coordinates with the orientation signals received from the deflector and adjusts the drive signals supplied to the module to reduce any difference between the received coordinates and the orientation signals. The switch also employs optical alignment to precisely orient pairs of deflectors coupling a beam of light between optical fibers.

Abstract: An electron beam blanker for use in electron beam lithography systems is disclosed which is capable of providing exposure rates on the order of 300MHz at beam currents of approximately 600nA. A condensing lens and a stigmator are provided to bring the electron beam to a small image in a plane perpendicular to the beam direction. An etched silicon knife-edge, coated with gold, is located in this image plane in close proximity to the beam, to provide a sharp cut-off as the beam is swept past its edge. In accordance with aspects of the invention, a deflector plate structure provides an electromagnetic field whose geometry ensures that the velocity of a beam electron, as it exits the field, is substantially directly proportional to the undeflected beam electron's position vector relative to the beam cross-over in the image plane of the condenser lens.

Abstract: A recirculating gas laser includes a gas-containing closed chamber having optically aligned mirrors adjacent the ends with a closed loop gas recirculation path, means for moving the gas around that path, and means for producing an electrical discharge in the gas, generally transversely of the optical axis. A heat exchanger for cooling the gas is interposed in the gas flow path, and means for supporting the mirrors extend longitudinally of the chamber and are positioned within the gas flow path to receive the cooled gases thereagainst, this support means being mounted to the chamber by other means which isolate the support from expansion and contraction of the chamber.

Abstract: Apparatus is described for producing an electric glow discharge in gas flowing along a channel with the discharge extending in a direction generally transverse to the flow, such apparatus including a first electrode disclosed adjacent a first wall of the flow channel and a generally planar second electrode disposed adjacent a second wall of the flow channel opposed to the first wall, the second electrode being formed of a material having a resistivity in the range of 10.sup.2 to 10.sup.6 ohm-centimeters. Means for electrically energizing the first and second electrodes to establish the glow discharge are also provided.