Patents by Inventor Jack E. Ward

Jack E. Ward has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Use of alkylphosphines and alkylarsines in ion implantation
    Patent number: 4721683
    Abstract: Liquid alkylphosphines and alkylarsines are used as the ion source for improved ion implantation in the doping of semiconductor materials. A higher proportion of the total beam current is obtained as phosphorus and arsenic ion beam current in comparison with the use of gaseous phosphine and arsine, respectively, as the ion sources. Tertiarybutylphosphine and isobutylphosphine are the most preferred alkylphosphines, and tertiarybutylarsine is the most preferred alkylarsine for this use.
    Type: Grant
    Filed: May 21, 1987
    Date of Patent: January 26, 1988
    Assignee: American Cyanamid Company
    Inventor: Jack E. Ward