Patents by Inventor Jack M. Florence

Jack M. Florence has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aluminum metaphosphate dopant sources
    Patent number: 3998668
    Abstract: A solid source consisting essentially of high purity aluminum metaphosphate, Al(PO.sub.3).sub.3 is used for introducing elemental phosphorus into P-type silicon chips or wafers of semi-conductor grade. The aluminum metaphosphate functions as a source for the controlled release of P.sub.2 O.sub.5 vapors which are directed to the desired face of the silicon wafer. The reverse side of the silicon wafer receives little or no phosphorus and consequently retains its character as P-type silicon.
    Type: Grant
    Filed: March 18, 1976
    Date of Patent: December 21, 1976
    Assignee: Owens-Illinois, Inc.
    Inventors: Jack M. Florence, William E. Smith