Patents by Inventor Jackie Ding

Jackie Ding has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to improve surface uniformity of a layer of arc used for the creation of contact plugs
    Patent number: 6630397
    Abstract: In accordance with the objectives of the invention a new processing sequence is provided for the creation of a layer of ARC. A first layer of ARC is deposited over a supporting surface, a blanket etch is performed to the surface of the first layer of ARC, leaving any openings that have been created in the supporting surface essentially filled with ARC material. A second layer of ARC is next applied over the surface of the etched first layer of ARC, this second layer of ARC provides a layer of ARC that is of uniform thickness over the supporting surface. Steps of baking may be applied to each of the layers of ARC after these layers have been deposited or after the first layer of ARC has been etched.
    Type: Grant
    Filed: December 10, 2002
    Date of Patent: October 7, 2003
    Assignee: ProMos Technologies
    Inventors: Jackie Ding, Sheng-Fen Chiu, Chi-Long Chung