Patents by Inventor Jacob Frederik Klinkhamer

Jacob Frederik Klinkhamer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Position determination method and a lithographic apparatus
    Publication number: 20060072087
    Abstract: An embodiment of the invention may be applied to measure the positions of features in a alignment region on a mask with a sensor. The positions of the features in the alignment region are known from the design. A feature of which the position is measured, is identified by comparing the relative positions between measured features with relative positions known from the design. The known position of the identified feature is subtracted from a measured position of the identified feature to give the position of the mask.
    Type: Application
    Filed: October 1, 2004
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Jacob Frederik Klinkhamer, Anastasius Jacobus Bruinsma, Martinus Hendrikus Leenders, Hubert Van Mierlo