Abstract: Embodiments described herein relate to an apparatus that includes an RF power supply and an RF power splitter with switched outputs. In an embodiment, an apparatus includes a radio frequency (RF) power supply, and an RF power splitter electrically coupled to the RF power supply. In an embodiment, the RF power splitter includes a plurality of outputs. In an embodiment, each one of a plurality of RF impedance matches are electrically coupled to a different one of the plurality of outputs of the RF power splitter. In an embodiment, a plurality of switches are along a different one of a plurality of RF cables that couple each of the plurality of outputs of the RF power splitter to a different one of the plurality of RF impedance matches. In an embodiment, the apparatus further includes a controller communicatively coupled to the plurality of switches and the plurality of RF impedance matches, and the controller is configured to tune the plurality of RF impedance matches to a matched input.

Abstract: Embodiments described herein relate to an apparatus that includes an RF power supply and an RF power splitter. In an embodiment, the RF power splitter includes a plurality of outputs, and a plurality of RF impedance matches are electrically coupled to different ones of the plurality of outputs of the RF power splitter. In an embodiment, a plurality of RF sensors are configured to measure a voltage and/or a current along a plurality of transmission lines that couple each of the plurality of outputs of the RF power splitter to a different one of the plurality of RF impedance matches. In an embodiment, the apparatus further includes a controller communicatively coupled to the plurality of RF sensors and the plurality of RF impedance matches. The controller is configured to balance power that passes through the plurality of RF impedance matches with a detuning operation.

Abstract: Embodiments disclosed herein include an apparatus that includes a radio frequency (RF) power supply, and a power splitter electrically coupled to the RF power supply. In an embodiment, the apparatus includes a plurality of impedance matches electrically coupled to the power splitter, where the power splitter is configured to split RF power from the RF power supply in order to supply the RF power to each of the plurality of impedance matches. In an embodiment, the apparatus further includes a plurality of chambers, wherein each chamber is electrically coupled to a different one of the plurality of impedance matches.