Abstract: A self-propelled, self-steering floor cleaning appliance is provided with at least one cleaning element for cleaning a floor surface, including a drive device having an undercarriage, a sensing part for sensing obstacles, at least one displaceable holding part for holding the sensing part on the floor cleaning appliance and at least one detection element for detecting a displacement of the at least one holding part and for providing a signal relating thereto. The floor cleaning appliance includes at least one accommodating part on which the at least one holding part is held so as to be displaceable in a first and a second direction of displacement, which is aligned at an angle to the first direction of displacement, and the at least one detection element is actuatable by the at least one holding part upon displacement of the holding part in the first and in the second directions of displacement.

Abstract: The invention relates to a cleaning brush for a floor cleaner, in particular, a self-propelled and self-steering floor cleaner, including at least one brush unit having a brush body defining a brush axis and being provided with cleaning bristles and having a first end and a second end, the at least one brush unit including at the first end or in the region of the first end a torque receiver device for coupling with a drive device of the floor cleaner. To provide such a cleaning brush which can be reliably mounted on a floor cleaner in a constructionally simple way, the at least one brush unit includes a bearing device for mounting on the floor cleaner, which is arranged between the first end and the second end. The invention also relates to a floor cleaner with a cleaning brush, in particular, a self-propelled and self-steering floor cleaner.

Abstract: A self-propelling and self-steering floor cleaning appliance is provided which includes at least one cleaning unit and a dirt collecting container having a container interior, a bottom wall, a dirt inlet opening and a dirt outlet opening formed on the bottom wall, wherein dirt particles are transferable by means of the at least one cleaning unit into the container interior. To enable easy removal of dirt particles from the dirt collecting container while achieving a simple design, the floor cleaning appliance has a valve device actuatable by air pressure and arranged at the dirt outlet opening with at least one valve body which, in a closed position, at least partially forms the bottom wall and closes the dirt outlet opening and is transferable into an open position in which the dirt outlet opening is at least partially uncovered. The invention further relates to a cleaning system.

Abstract: Embodiments described herein generally relate to the fabrication of integrated circuits and more particularly to nitrogen doped amorphous carbon layers and processes for depositing nitrogen doped amorphous carbon layers on a semiconductor substrate. In one embodiment, a method of forming a nitrogen doped amorphous carbon layer on a substrate is provided. The method comprises positioning a substrate in a substrate processing chamber, introducing a nitrogen containing hydrocarbon source into the processing chamber, introducing a hydrocarbon source into the processing chamber, introducing a plasma-initiating gas into the processing chamber, generating a plasma in the processing chamber, and forming a nitrogen doped amorphous carbon layer on the substrate.

Abstract: A self-propelled, self-steering floor cleaning appliance is provided with at least one cleaning element for cleaning a floor surface, including a drive device having an undercarriage, a sensing part for sensing obstacles, at least one displaceable holding part for holding the sensing part on the floor cleaning appliance and at least one detection element for detecting a displacement of the at least one holding part and for providing a signal relating thereto. The floor cleaning appliance includes at least one accommodating part on which the at least one holding part is held so as to be displaceable in a first and a second direction of displacement, which is aligned at an angle to the first direction of displacement, and the at least one detection element is actuatable by the at least one holding part upon displacement of the holding part in the first and in the second directions of displacement.

Abstract: The invention relates to a cleaning brush for a floor cleaner, in particular, a self-propelled and self-steering floor cleaner, including at least one brush unit having a brush body defining a brush axis and being provided with cleaning bristles and having a first end and a second end, the at least one brush unit including at the first end or in the region of the first end a torque receiver device for coupling with a drive device of the floor cleaner. To provide such a cleaning brush which can be reliably mounted on a floor cleaner in a constructionally simple way, the at least one brush unit includes a bearing device for mounting on the floor cleaner, which is arranged between the first end and the second end. The invention also relates to a floor cleaner with a cleaning brush, in particular, a self-propelled and self-steering floor cleaner.

Abstract: Embodiments described herein generally relate to the fabrication of integrated circuits and more particularly to nitrogen doped amorphous carbon layers and processes for depositing nitrogen doped amorphous carbon layers on a semiconductor substrate. In one embodiment, a method of forming a nitrogen doped amorphous carbon layer on a substrate is provided. The method comprises positioning a substrate in a substrate processing chamber, introducing a nitrogen containing hydrocarbon source into the processing chamber, introducing a hydrocarbon source into the processing chamber, introducing a plasma-initiating gas into the processing chamber, generating a plasma in the processing chamber, and forming a nitrogen doped amorphous carbon layer on the substrate.

Abstract: Embodiments of the invention are directed toward the deposition of Graphene on a semiconductor substrate. In some embodiments, these processes can occur at low temperature levels during a back end of the line process. For example, Graphene can be deposited in a CVD reactor at a processing temperature that is below 600° C. to protect previously deposited layers that may be susceptible to sustained higher temperatures. Graphene deposition can include the deposition of an underlayer (e.g., cobalt) followed by the flow of a carbon precursor (e.g., acetylene) at the processing temperature. Graphene can then be synthesized with during cooling, an RTP cure, and/or a UV cure.

Abstract: Embodiments described herein generally relate to the fabrication of integrated circuits and more particularly to nitrogen doped amorphous carbon layers and processes for depositing nitrogen doped amorphous carbon layers on a semiconductor substrate. In one embodiment, a method of forming a nitrogen doped amorphous carbon layer on a substrate is provided. The method comprises positioning a substrate in a substrate processing chamber, introducing a nitrogen containing hydrocarbon source into the processing chamber, introducing a hydrocarbon source into the processing chamber, introducing a plasma-initiating gas into the processing chamber, generating a plasma in the processing chamber, and forming a nitrogen doped amorphous carbon layer on the substrate.

Abstract: The invention relates to a floor cleaning appliance comprising a suction turbine with a turbine wheel rotatingly drivable about a turbine axis, and a substantially horizontally aligned suction channel via which the suction turbine is in flow communication with a suction opening facing the floor surface to be cleaned, with the suction channel forming a container for collecting dirt and accommodating a dirt filter. In order to design the floor cleaning appliance with as low an overall height as possible, while achieving as strong a suction flow as possible in the area of the suction opening, it is proposed, in accordance with the invention, that the suction turbine be mounted on the suction channel with its turbine axis aligned at an incline to the vertical.