Patents by Inventor Jacob Klenijn

Jacob Klenijn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS
    Publication number: 20110205517
    Abstract: A mount configured to mount an optical element in a module for a lithographic apparatus. The mount includes a plurality of resilient members constructed and arranged to circumferentially support the optical element. Each resilient member includes a plurality of resilient subsections that are configured to engage the optical element around a perimeter thereof Each resilient subsection is configured to flex independent of another resilient subsection.
    Type: Application
    Filed: July 16, 2009
    Publication date: August 25, 2011
    Applicant: ASML Netherlands B.V.
    Inventors: Henricus Gerardus Tegenbosch, Alexander Matthijs Struycken, Jacob Klenijn, Ruud, Antonius Catharina, Maria Beerens, Ivo Vanderhallen