Abstract: A method is disclosed of fabricating a MEMS device that includes one or more wafers configured as pump or valve. The pump or valve includes an inlet port to receive fluid and an outlet port to release the fluid within the pump or valve. The method comprises growing silicon dioxide on a silicon layer of the one or more wafers to form a silicon dioxide layer on the silicon layer, depositing silicon nitride on the silicon dioxide layer of the one or more wafers to form a silicon nitride layer on the silicon dioxide layer, spinning a front side to create a pattern thereon defining an area for the pump or valve, dry etching the one or more wafers at the area for the pump or valve to remove the silicon dioxide and silicon nitride layers to define an opening for the pump or valve.

Abstract: A MEMS device for a device for delivering medicament to a user, the MEMS device comprising: a first port and a second port to enable medicament to flow through the MEMS device; first and second wafers that define a cavity therebetween that communicates with the first and second ports, thereby creating a fluid path for a flow of the medicament from the first port to the second port, the first wafer configured as a membrane adapted to deform, the cavity including a first chamber that communicates with the second port; a first valve section including a first valve seat around the first port; and a first piezoelectric actuator layered on the first wafer and configured to cause the membrane to deform and close off the first valve seat, thereby preventing fluid flow through the first port.

Abstract: A MEMS device for delivering medicament, the MEMS device configured as a valve for permitting or preventing a flow of the medicament to the user, the MEMS device comprising: a first port and a second port to enable medicament to flow through the MEMS device; first and second wafers that define a cavity that communicates with the first and second ports, the first wafer configured as a membrane, the cavity including a first chamber that communicates with the second port; a valve section including a first piezoelectric actuator layered on the first wafer and configured to cause the membrane to deform and seal the second port, wherein the first piezoelectric actuator is configured to store sufficient charge from an applied voltage to cause the membrane to remain deformed and to maintain the seal on the second port as the MEMS device encounters a loss of power.

Abstract: A device for delivering insulin to a user, the device configured as a wearable apparatus or system in which continuous glucose monitoring (CGM), insulin delivery and control functionality are provided to ensure insulin is delivered to the user, the device comprising: a reservoir for storing insulin; a catheter configured to deliver insulin to a subcutaneous layer of the user; an introducer needle movable with respect to the catheter, the introducer needle configured to facilitate (a) insertion of the catheter into the subcutaneous layer of the user and (b) removal of the introducer needle to enable delivery of insulin through the catheter; a micropump, in fluid communication with the reservoir and catheter, for pumping insulin from the reservoir through the catheter; and a pressure sensor separate from and in fluid communication with an outlet port of the micropump, the sensor comprising: a first wafer defining an inlet port, and outlet port and fluid channel communicating with the inlet and outlet ports; a s

Abstract: A MEMS device is disclosed for a device for delivering insulin into a subcutaneous tissue of a user.

Abstract: A MEMS device is disclosed that is configured as a micropump with an inlet port to receive fluid and an outlet port to release the fluid from the micropump. The MEMS device comprises first and second wafers, the first wafer configured as a membrane; a chamber defined by the first and second wafers for receiving fluid, the chamber configured to communicate with the inlet and outlet ports and defining a fluidic pathway between the inlet and outlet ports, wherein the first wafer is configured to deform creating a pressure difference within the chamber and thereby move fluid into or from the chamber via inlet and outlet ports, respectively; and first sensor and second sensors, in proximity to the inlet and outlet ports respectively, for sensing flow or pressure.

Abstract: A MEMs micropump is disclosed that is configured as a substrate including a lower wafer and an upper wafer that together function as a pump and first and second valves on opposing sides of the pump, the micropump comprising: an inlet port for receiving fluid and an outlet port for releasing fluid, a chamber that communicates with the inlet and outlet ports, the chamber and inlet and outlet ports function together as a fluid path within the micropump; and a membrane, as part of the upper wafer, configured to deflect in and out of the fluid path, wherein the first and second valves each include a valve seat within the fluid path and a thin film piezoelectric layer configured to cause the membrane to deflect and engage the valve seat thereby preventing fluid flow within the fluid path; and wherein the pump including the chamber and a bulk piezoelectric layer for causing the membrane to deflect, thereby withdrawing fluid from the inlet port into the chamber and pumping fluid out of the chamber and outlet port.

Abstract: A device for delivering a medication to a patient in a drug infusion system is disclosed. The device is configured as a fully autonomous and integrated wearable apparatus for managing the medication delivery. The device comprises: a reservoir for storing the medication to be delivered to the patient; a continuous glucose monitoring device for monitoring glucose levels in the patient to set flow rates for medication delivery; a needle for delivering the medication from reservoir into the patient; and a pumping unit including one or more MEMS devices configured to function as (a) a pump for pumping the medication from the reservoir through a flow path for medication to the needle at set flow rates and/or (b) a valve for regulating flow of the medication in the flow path from the reservoir through the needle.

Abstract: A method is disclosed of fabricating a MEMS device that includes one or more wafers configured as pump or valve. The pump or valve includes an inlet port to receive fluid and an outlet port to release the fluid within the pump or valve. The method comprises growing silicon dioxide on a silicon layer of the one or more wafers to form a silicon dioxide layer on the silicon layer, depositing silicon nitride on the silicon dioxide layer of the one or more wafers to form a silicon nitride layer on the silicon dioxide layer, spinning a front side to create a pattern thereon defining an area for the pump or valve, dry etching the one or more wafers at the area for the pump or valve to remove the silicon dioxide and silicon nitride layers to define an opening for the pump or valve.