Patents by Inventor Jacob Newman
Jacob Newman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11923217Abstract: An embodiment is a processing system for processing a substrate. The processing system includes a Front Opening Unified Pod (FOUP) load lock (FLL) and a vacuum system. The FLL has walls defining an interior space therein. The FLL includes load lock isolation and tunnel isolation doors. The load lock isolation door is operable to close a first opening in a first sidewall of the FLL. The first opening is sized so that a FOUP is capable of passing therethrough. The tunnel isolation door is operable to close a second opening in a second sidewall of the FLL. The second opening is sized so that a substrate is capable of passing therethrough. The vacuum system is fluidly connected to the interior space of the FLL and is operable to pump down a pressure of the interior space of the FLL.Type: GrantFiled: July 5, 2022Date of Patent: March 5, 2024Assignee: Applied Materials, Inc.Inventor: Jacob Newman
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Patent number: 11894251Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: GrantFiled: January 5, 2022Date of Patent: February 6, 2024Assignee: Applied Materials, Inc.Inventors: Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf, Jeffrey C. Hudgens, Alexander Berger, William Tyler Weaver
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Patent number: 11817332Abstract: Embodiments of the disclosure are directed to load lock chambers and methods of using load lock chambers. The load lock chambers include a middle section, an upper section connected to the middle section and a lower section connected to the middle section. A slit valve in a facet on the outside of the middle section provides an opening to access the middle volume from outside the load lock.Type: GrantFiled: September 22, 2020Date of Patent: November 14, 2023Assignee: APPLIED MATERIALS, INC.Inventors: William T. Weaver, Andrew J. Constant, Shay Assaf, Jacob Newman
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Publication number: 20230187239Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a load lock disposed within the interior volume of the factory interface, and a factory interface robot disposed within the interior volume of the factory interface, wherein the factory interface robot is configured to transfer substrates between a set of substrate carriers and the load lock.Type: ApplicationFiled: February 9, 2023Publication date: June 15, 2023Inventors: Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti
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Publication number: 20230113673Abstract: A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.Type: ApplicationFiled: October 12, 2021Publication date: April 13, 2023Inventors: Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant, Michael R. Rice, Shay Assaf, Srinivas Poshatrahalli Gopalakrishna, Devendra Channappa Holeyannavar, Douglas B. Baumgarten, Arunkumar Ramachandraiah, Narayanan Ramachandran
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Patent number: 11581203Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a first load lock disposed within the interior volume of the factory interface, and a first factory interface robot disposed within the interior volume of the factory interface, wherein the first factory interface robot is configured to transfer substrates between a first set of substrate carriers and the first load lock.Type: GrantFiled: August 3, 2021Date of Patent: February 14, 2023Assignee: Applied Materials, Inc.Inventors: Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti
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Publication number: 20220406630Abstract: An embodiment is a processing system for processing a substrate. The processing system includes a Front Opening Unified Pod (FOUP) load lock (FLL) and a vacuum system. The FLL has walls defining an interior space therein. The FLL includes load lock isolation and tunnel isolation doors. The load lock isolation door is operable to close a first opening in a first sidewall of the FLL. The first opening is sized so that a FOUP is capable of passing therethrough. The tunnel isolation door is operable to close a second opening in a second sidewall of the FLL. The second opening is sized so that a substrate is capable of passing therethrough. The vacuum system is fluidly connected to the interior space of the FLL and is operable to pump down a pressure of the interior space of the FLL.Type: ApplicationFiled: July 5, 2022Publication date: December 22, 2022Inventor: Jacob NEWMAN
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Patent number: 11380564Abstract: An embodiment is a processing system for processing a substrate. The processing system includes a Front Opening Unified Pod (FOUP) load lock (FLL) and a vacuum system. The FLL has walls defining an interior space therein. The FLL includes load lock isolation and tunnel isolation doors. The load lock isolation door is operable to close a first opening in a first sidewall of the FLL. The first opening is sized so that a FOUP is capable of passing therethrough. The tunnel isolation door is operable to close a second opening in a second sidewall of the FLL. The second opening is sized so that a substrate is capable of passing therethrough. The vacuum system is fluidly connected to the interior space of the FLL and is operable to pump down a pressure of the interior space of the FLL.Type: GrantFiled: August 20, 2019Date of Patent: July 5, 2022Assignee: Applied Materials, Inc.Inventor: Jacob Newman
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Publication number: 20220130700Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: ApplicationFiled: January 5, 2022Publication date: April 28, 2022Inventors: Jacob NEWMAN, Ulrich OLDENDORF, Martin AENIS, Andrew J. CONSTANT, Shay ASSAF, Jeffrey C. HUDGENS, Alexander BERGER, William Tyler WEAVER
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Publication number: 20220068677Abstract: The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a first load lock disposed within the interior volume of the factory interface, and a first factory interface robot disposed within the interior volume of the factory interface, wherein the first factory interface robot is configured to transfer substrates between a first set of substrate carriers and the first load lock.Type: ApplicationFiled: August 3, 2021Publication date: March 3, 2022Inventors: Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti
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Patent number: 11232965Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: GrantFiled: October 2, 2019Date of Patent: January 25, 2022Assignee: APPLIED MATERIALS, INC.Inventors: Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf, Jeffrey C. Hudgens, Alexander Berger, William Tyler Weaver
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Patent number: 11204312Abstract: Full wafer in-situ metrology chambers and methods of use are described. The metrology chambers include a substrate support and a sensor bar that are rotatable relative to each other. The sensor bar includes a plurality of sensors at different radii from a central axis.Type: GrantFiled: March 13, 2020Date of Patent: December 21, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Ami Sade, Todd Egan, Shay Assaf, Jacob Newman
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Publication number: 20210285865Abstract: Full wafer in-situ metrology chambers and methods of use are described. The metrology chambers include a substrate support and a sensor bar that are rotatable relative to each other. The sensor bar includes a plurality of sensors at different radii from a central axis.Type: ApplicationFiled: March 13, 2020Publication date: September 16, 2021Applicant: Applied Materials, Inc.Inventors: Ami Sade, Todd Egan, Shay Assaf, Jacob Newman
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Publication number: 20210204861Abstract: A portable wearable eye movement monitoring system, device and method are disclosed. The system comprises a sensor electrode array (22a, 22b) configured to be attached substantially about each of a plurality predetermined positions on a user's face, a logging unit 30 and a battery power source. The sensor electrode array (22a, 22b), when worn, is positioned laterally about the user's head with respect to the user's eyes whereby the portable wearable eye movement monitoring system is substantially outside the user's field of vision. The sensor electrode array (22a, 22b) is configured to obtain data on eye movements of the subject. The logging unit (30) is configured to communicate with the sensor electrode array (22a, 22b) to receive the obtained data and record the data in a data store, the battery power source being configured to power the wearable monitoring system for a plurality of days whereby data on eye movements of the subject is captured substantially continuously for said plurality of days.Type: ApplicationFiled: May 24, 2019Publication date: July 8, 2021Inventors: John PHILLIPS, Stephen COX, Jacob NEWMAN, Matthew WRIGHT, Justin PISANI
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Publication number: 20210090917Abstract: Embodiments of the disclosure are directed to load lock chambers and methods of using load lock chambers. The load lock chambers include a middle section, an upper section connected to the middle section and a lower section connected to the middle section. A slit valve in a facet on the outside of the middle section provides an opening to access the middle volume from outside the load lock.Type: ApplicationFiled: September 22, 2020Publication date: March 25, 2021Applicant: Applied Materials, Inc.Inventors: William T. Weaver, Andrew J. Constant, Shay Assaf, Jacob Newman
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Patent number: 10818525Abstract: Methods and apparatus for processing a substrate are provided herein. In one implementation, the apparatus includes a load lock chamber coupled to a transfer chamber. The transfer chamber is coupled to a thermal process chamber and a substrate is transferred between each of the load lock chamber, the transfer chamber, and the thermal process chamber. In other implementations, a process platform having a load lock chamber, a transfer chamber, and a thermal process chamber is disclosed. Methods of measuring oxygen concentration in a load lock chamber via evacuation of a transfer chamber are also described herein.Type: GrantFiled: June 4, 2019Date of Patent: October 27, 2020Assignee: Applied Materials, Inc.Inventors: Shay Assaf, Andrew Constant, Jacob Newman, Charles Carlson, William Tyler Weaver, Stephen Hickerson
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Patent number: 10677830Abstract: An apparatus for relaying microwave field intensity in a microwave cavity. In some embodiments, the apparatus comprises a microwave transparent substrate with at least one Radio Frequency (RF) detector that is capable of detecting a microwave field and generating a signal associated with a field intensity of the detected microwave field and a transmitter that receives the signal associated with the detected microwave field from the RF detector and transmits or stores information about the detected microwave field intensity. In some embodiments, the apparatus relays the microwave intensity via a wired, wireless, or optical transmitter located in proximity of the RF detector.Type: GrantFiled: July 13, 2017Date of Patent: June 9, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Ananthkrishna Jupudi, Yueh Sheng Ow, Jacob Newman, Preetham Rao, Yuichi Wada, Vinodh Ramachandran
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Publication number: 20200111692Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.Type: ApplicationFiled: October 2, 2019Publication date: April 9, 2020Inventors: Jacob NEWMAN, Ulrich OLDENDORF, Martin AENIS, Andrew J. CONSTANT, Shay ASSAF, Jeffrey C. HUDGENS, Alexander BERGER, William Tyler WEAVER
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Publication number: 20200090966Abstract: An embodiment is a processing system for processing a substrate. The processing system includes a Front Opening Unified Pod (FOUP) load lock (FLL) and a vacuum system. The FLL has walls defining an interior space therein. The FLL includes load lock isolation and tunnel isolation doors. The load lock isolation door is operable to close a first opening in a first sidewall of the FLL. The first opening is sized so that a FOUP is capable of passing therethrough. The tunnel isolation door is operable to close a second opening in a second sidewall of the FLL. The second opening is sized so that a substrate is capable of passing therethrough. The vacuum system is fluidly connected to the interior space of the FLL and is operable to pump down a pressure of the interior space of the FLL.Type: ApplicationFiled: August 20, 2019Publication date: March 19, 2020Inventor: Jacob NEWMAN
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Publication number: 20190375105Abstract: Electronic device processing systems may include a mainframe housing having a transfer chamber, a first carousel assembly, a second carousel assembly, a first load lock, a second load lock, and a robot adapted to operate in the transfer chamber to exchange substrates between the first and second carousels and the first and second load locks. The robot may include first and second end effectors operable to extend and/or retract simultaneously or sequentially along substantially co-parallel lines of action. Methods and multi-axis robots for transporting substrates are described, as are numerous other aspects.Type: ApplicationFiled: August 21, 2019Publication date: December 12, 2019Inventors: William T. Weaver, Malcolm N. Daniel, JR., Robert B. Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade, Andrew J. Constant, Stephen C. Hickerson, Jeffrey C. Hudgens, Marvin L. Freeman