Abstract: A portable fuel cell system includes a fuel cell having a plurality of flow inputs and a power output, a temperature sensor configured to measure operating temperature of the fuel cell, a power output sensor coupled to the fuel cell and configured to measure a power parameter related to fuel cell power output, a controllable power converter, coupled to the power output of the fuel cell, that transfers power from the fuel cell to the fuel cell system, and a flow control device coupled to a first flow input and configured to control a first one of the flow inputs into the fuel cell. The system further includes a fuel cell system controller, coupled to the fuel cell, the power output, the temperature sensor, the power output sensor, the controllable power converter, and the flow control device.

Abstract: A fuel cell system for providing power to a load, and having a safety mode, is disclosed. The system includes a fuel cell configured to convert fuel to electrical power and coupled so as to provide electrical power at a fuel cell power output, a system power port having a power connection and a data connection, configured to be reversibly coupled to the load, a power connection controller, coupled to the fuel cell power output and to the system power port, and configured to enable and disable the power connection, and a fuel cell system controller coupled to the fuel cell, the data connection and the power connection controller. The fuel cell system controller has a normal mode and a safety mode. A user selection determines whether the fuel cell system controller is in the normal mode or the safety mode. If the load has a smart power port, the data connection is configured to communicate over the smart power port.

Abstract: A portable fuel cell system includes a fuel cell having a plurality of flow inputs and a power output, a temperature sensor configured to measure operating temperature of the fuel cell, a power output sensor coupled to the fuel cell and configured to measure a power parameter related to fuel cell power output, a controllable power converter, coupled to the power output of the fuel cell, that transfers power from the fuel cell to the fuel cell system, and a flow control device coupled to a first flow input and configured to control a first one of the flow inputs into the fuel cell. The system further includes a fuel cell system controller, coupled to the fuel cell, the power output, the temperature sensor, the power output sensor, the controllable power converter, and the flow control device.

Abstract: A fuel cell system for providing power to a load, and having a safety mode, is disclosed. The system includes a fuel cell configured to convert fuel to electrical power and coupled so as to provide electrical power at a fuel cell power output, a system power port having a power connection and a data connection, configured to be reversibly coupled to the load, a power connection controller, coupled to the fuel cell power output and to the system power port, and configured to enable and disable the power connection, and a fuel cell system controller coupled to the fuel cell, the data connection and the power connection controller. The fuel cell system controller has a normal mode and a safety mode. A user selection determines whether the fuel cell system controller is in the normal mode or the safety mode. If the load has a smart power port, the data connection is configured to communicate over the smart power port.

Abstract: The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond.

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond.

Abstract: The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond.

Abstract: An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to five milliseconds and on a very fast time frame of a few microseconds. Preferred techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control with the combination of a stepper motor and a piezoelectric driver. Very fast wavelength control is provided with a piezoelectric load cell in combination with the piezoelectric driver.

Abstract: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond.

Abstract: An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to five milliseconds and on a very fast time frame of a few microseconds. Preferred techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control with the combination of a stepper motor and a piezoelectric driver. Very fast wavelength control is provided with a piezoelectric load cell in combination with the piezoelectric driver.