Abstract: The invention concerns a chemical sensor comprising at least one cantilever sensor unit with a capture surface for a chemical substance to be detected. The cantilever comprises a piezoresistor of doped single crystalline silicon with a pair of wires for applying an electrical field over the piezoresistor, and a current shield capable of shielding the piezoresistor electrically from a liquid for a sufficient time to performing a measurement when a liquid sample is applied in contact with the capture surface. The current shield comprises one or more of the materials selected from the group consisting of nitrides, such as silicon nitride, metal oxides, such as aluminum oxide, ceramics, diamond films, silicon carbide, tantalum oxide, single crystalline silicon, glass mixtures and combinations thereof, said current shield preferably comprises one or more of the materials silicon nitride and single crystalline silicon. The invention also relates to methods of preparing such chemical sensor.

Abstract: The present invention relates to a sensor comprising least one sensor unit e.g. a cantilever. The sensor unit comprises a capture surface area and a piezoresistive detection system, for direct detection of stress change of the sensor unit when applying an electrical field over the piezoresistive element. The piezoresistive element has a longitudinal direction in the current direction and a transverse direction perpendicular there to. The longitudinal direction and the transverse direction each has a stress composant and a current composant. The piezoresistive element is of an anisotropic material, and is arranged so that the numerically value of the sum of the longitudinal piezoresistive coefficient ?1 and the transverse piezoresistive coefficient ?t along at least 25% of the length, of the piezoresistive element is at least 10?10 Pa?1×P, such as 2×10?10 Pa?1×P.

Abstract: The present invention relates to integrated micro-cantilevers, micro-bridges or micro-membranes in micro-liquid handling systems. Such micro-liquid handling systems provide novel detection mechanisms for monitoring the physical, chemical and biological properties of fluids in such systems. The present invention further relates to micro-cantilever, micro-bridge or micro-membrane type sensors having integrated readout. Such constructions allow laminated flows of different liquids to flow in a channel without mixing, which opens up for new type of experiments and which reduces noise related to the liquid movement. The present invention even further relates to sensors having adjacent or very closely spaced micro-cantilevers, micro-bridges or micro-membranes which can be exposed to different chemical environments at the same time.

Abstract: The invention relates to a chemical sensor comprising at least one cantilever sensor unit with a piezoresistive element for direct read out. The sensor comprises a primary substrate carrying the cantilevers and with a primary substrate carrying the cantilevers and with a primary cavity and a primary connecting surface at least partly surrounding said cavity. The cantilevers protrude into the primary cavity. The piezoresistive elements are electrically connected to primary connecting pads on the primary connecting surface. The sensor also comprises a secondary connecting pads, corresponding to the primary connecting pads, on a secondary connecting surface corresponding to the primary connecting surface. The primary connecting surface and the secondary connection surface are mounted to each other so that said primary connecting pads and said secondary connecting pads are direct mounted to each other, preferably in a flip chip mounting.

Abstract: The present invention relates to a sensor comprising least one sensor unit e.g. a cantilever. The sensor unit comprises a capture surface area and a piezoresistive detection system, for direct detection of stress change of the sensor unit when applying an electrical field over the piezoresistive element. The piezoresistive element has a longitudinal direction in the current direction and a transverse direction perpendicular there to. The longitudinal direction and the transverse direction each has a stress composant and a current composant. The piezoresistive element is of an anisotropic material, and is arranged so that the numerically value of the sum of the longitudinal piezoresistive coefficient ?1 and the transverse piezoresistive coefficient ?t along at least 25% of the length, of the piezoresistive element is at least 10?10 Pa?1×P, such as 2×10?10 Pa?1×P.

Abstract: The invention relates to a sensor comprising at least 3 sensor units arranged in one or more rows of sensor units. Each sensor unit comprises a piezoresistor and wires for applying a voltage over the piezoresistor. The sensor units of the row is connected to each other via a sensor unit row connection wire whereto the first supply wire is connected. The second supply wire is connected to one or more basis resistors. One or more of the sensor units comprise an output wire for measuring an output signal. The output wire is connected to the sensor unit via the sensor-resistor wire connecting the sensor unit and the one or more basis resistors. By the present invention it is possible to configure the sensor unit array such that it is possible to multiplex the signal and thereby get in contact with each single array element by only having one electrical wire per row and column, where column indicates the number of sensors per row.

Abstract: The invention concerns a chemical sensor comprising at least one cantilever sensor unit with a capture surface for a chemical substance to be detected. The cantilever comprises a piezoresistor of doped single crystalline silicon with a pair of wires for applying an electrical field over the piezoresistor, and a current shield capable of shielding the piezoresistor electrically from a liquid for a sufficient time to performing a measurement when a liquid sample is applied in contact with the capture surface. The current shield comprises one or more of the materials selected from the group consisting of nitrides, such as silicon nitride, metal oxides, such as aluminium oxide, ceramics, diamond films, silicon carbide, tantalum oxide, single crystalline silicon, glass mixtures and combinations thereof, said current shield preferably comprises one or more of the materials silicon nitride and single crystalline silicon. The invention also relates to methods of preparing such chemical sensor.

Abstract: The invention relates to a sensor for detecting a substance in a liquid. The sensor comprises a pillar shaped primary substrate and a sensor unit, e.g. a cantilever connected to the primary substrate. The sensor comprises detecting means e.g. in the form of a piezoresistive element, a strain gauge, a Si or C nanotube, a capacitor or a piezoresistor, for detecting a change of stress or mass generated on a surface area of the sensor unit, and an electric communication line for applying a voltage over said detection means, wherein at least one of the wires is integrated in the pillar shaped primary substrate. The sensor in the form of a cantilever may e.g. have a two-dimensional shape selected from the group consisting of square, rectangular, triangular, pentagonal, hexagonal, leaf shaped, circular and oval periphery. The primary substrate may be connected to a secondary substrate such as an electronic chip comprising contact pads corresponding with wire exits from the primary substrate.

Abstract: The invention relates to a sensor comprising one or more sensor units, wherein at least one of the sensor units is in the form of a poly-cantilever structure. The poly-cantilever structure comprise two or more cantilever-like structures, at least one of the cantilever-like structures comprises a piezoresistive element, and at least one of the cantilever-like structures comprises a capture surface, at least one cantilever-like structure with a piezoresistive element designated a piezoresistive cantilever being connected in an amplifying connection to at least one of the cantilever-like structure with a capture surface designated a capture surface cantilever. The amplifying connection being provided so that a deflection of said capture surface cantilever due to a stress generated at said capture surface being capable of deflecting the connected piezoresistive cantilever. The sensor can be used for detection of a target substance in a fluid, such as a gas or a liquid.

Abstract: The present invention relates to integrated micro-cantilevers, micro-bridges or micro-membranes in micro-liquid handling systems. Such micro-liquid handling systems provide novel detection mechanisms for monitoring the physical, chemical and biological properties of fluids in such systems. The present invention further relates to micro-cantilever, micro-bridge or micro-membrane type sensors having integrated readout. Such constructions allow laminated flows of different liquids to flow in a channel without mixing, which opens up for new type of experiments and which reduces noise related to the liquid movement. The present invention even further relates to sensors having adjacent or very closely spaced micro-cantilevers, micro-bridges or micro-membranes which can be exposed to different chemical environments at the same time.

Abstract: The present invention relates to integrated micro-cantilevers, micro-bridges or micro-membranes in micro-liquid handling systems. Such micro-liquid handling systems provide novel detection mechanisms for monitoring the physical, chemical and biological properties of fluids in such systems. The present invention further relates to micro-cantilever, micro-bridge or micro-membrane type sensors having integrated readout. Such constructions allow laminated flows of different liquids to flow in a channel without mixing, which opens up for new type of experiments and which reduces noise related to the liquid movement. The present invention even further relates to sensors having adjacent or very closely spaced micro-cantilevers, micro-bridges or micro-membranes which can be exposed to different chemical environments at the same time.

Abstract: A polymer-based flexible structure with integrated sensing/actuator means is presented. Conventionally, silicon has been used as a piezo-resistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that e.g. an SU-8 based polymer is much softer than silicon and that e.g. a gold resistor is easily incorporated in SU-8 based polymer structure it has been demonstrated that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezo-resistive cantilever.

Abstract: A polymer-based flexible structure with integrated sensing/actuator means is presented. Conventionally, silicon has been used as a piezo-resistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that e.g. an SU-8 polymer is much softer than silicon and that e.g. a gold resistor is easily incorporated in SU-8 polymer structure it has been demonstrated that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezo-resistive cantilever.