Patents by Inventor Jacob Vink

Jacob Vink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070258069
    Abstract: A gas bearing has a first bearing part defining a first bearing surface and a second bearing part defining a second bearing surface. Between the first bearing surface and the second bearing surface there is a gap. A gas supply device supplies a gas to the gap. The first bearing part is at least partly ferromagnetic, and the second bearing part has at least one permanent magnet interacting with the first bearing part for pre-tensioning the gas bearing. The gas bearing may be part of a lithographic apparatus.
    Type: Application
    Filed: May 4, 2006
    Publication date: November 8, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Bastiaan Lambertus Van De Ven, Johannes Adrianus Dams, Jacob Vink
  • Publication number: 20070085987
    Abstract: The invention provides a height detecting apparatus for a lithographic apparatus. The height mapping apparatus includes a height mapping unit for providing at least one height map of a top surface of an object to be placed in a radiation beam of the lithographic apparatus, the object to be clamped by a clamping force applied thereto on a support constructed to support the object. The height mapping apparatus also includes a control unit for controlling the mapping unit to provide the at least one height map of the object relative to at least two different clamping pressure levels.
    Type: Application
    Filed: October 18, 2005
    Publication date: April 19, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Joost Ottens, Aschwin Lodewijk Hendricus Van Meer, Wim Tel, Jacob Vink, Rene Theodorus Compen, Petrus Gerrits
  • Publication number: 20050061995
    Abstract: A lithographic projection apparatus includes a beam production system for projecting a patterned beam of radiation onto a target portion of a substrate, and a support table for supporting an article. The support table has a support surface and an array of protrusions extending from the support surface to support the article on the protrusions. The apparatus also includes a detector for detecting height deviations of the protrusions that affect a surface flatness of the article, a height adjustment device arranged to independently modify a height of the individual protrusions when the support table is operable in the apparatus, and a controller coupled between the detector and the height adjustment device and arranged to control the height adjustment device to adjust the height of the protrusions corresponding to the detected height deviations of the protrusions that affect the surface flatness of the article.
    Type: Application
    Filed: August 11, 2004
    Publication date: March 24, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jacob Vink, Sjoerd Donders, Theodorus Modderman, Theodorus Cadee
  • Publication number: 20050018167
    Abstract: The invention relates to a method for positioning a substrate relative to a substrate table, is presented. When the substrate is positioned on the substrate table for a first time, a first relative position of the substrate with respect to the substrate table is determined. When the substrate is positioned on the substrate table a second subsequent time, a second relative position of the substrate with respect to the substrate table is determined and the position of the substrate table with respect to the substrate is adjusted based on the first and second relative positions, so that the substrate is positioned with respect to the substrate table substantially equally to the first relative position.
    Type: Application
    Filed: June 25, 2004
    Publication date: January 27, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Pieter Maria Hennus, Jacob Vink