Patents by Inventor Jacobus Cornelius Gerardus Van Der Sanden

Jacobus Cornelius Gerardus Van Der Sanden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
    Patent number: 10324383
    Abstract: A lithographic apparatus includes a clamp (406) configured to receive an object (402). The clamp defines at least one channel (408) configured to pass a fluid at a first fluid temperature. The lithographic apparatus also includes a chuck (404) coupled to the clamp. The chuck (404) defines at least one void (464) configured to thermally insulate the chuck from the clamp.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: June 18, 2019
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael Leo Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Geoffrey O'Connor, Michael Andrew Chieda, Tammo Uitterdijk