Patents by Inventor Jacobus Cornells Gerardus Van Der Sanden

Jacobus Cornells Gerardus Van Der Sanden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for rotating a wafer
    Patent number: 7351293
    Abstract: Method and device for rotating a wafer which is arranged floating in a reactor. The wafer is treated in a reactor of this nature, and it is important for this treatment to be carried out as uniformly as possible. For this purpose, it is proposed to rotate the wafer by allowing the gas flow to emerge perpendicular to the surface of the wafer and then to impart to this gas a component which is tangential with respect to the wafer, thus generating rotation. This tangential component may be generated by the provision of grooves, which may be of spiral or circular design.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: April 1, 2008
    Assignees: ASM International N.V., Koninklijke Philips Electronics N.V.
    Inventors: Vladimir Ivanovich Kuznetsov, Sijbrand Radelaar, Jacobus Cornells Gerardus Van Der Sanden, Theo Anjes Maria Ruijl
  • Method and device for rotating a wafer
    Patent number: 6824619
    Abstract: Method and device for rotating a wafer which is arranged floating in a reactor. The wafer is treated in a reactor of this nature, and it is important for this treatment to be carried out as uniformly as possible. For this purpose, it is proposed to rotate the wafer by allowing the gas flow to emerge perpendicular to the surface of the wafer and then to impart to this gas a component which is tangential with respect to the wafer, thus generating rotation. This tangential component may be generated by the provision of grooves, which may be of spiral or circular design.
    Type: Grant
    Filed: January 11, 2002
    Date of Patent: November 30, 2004
    Assignees: ASM International N.V., Koninklijke Philips Electronics N.V.
    Inventors: Vladimir Ivanovich Kuznetsov, Sijbrand Radelaar, Jacobus Cornells Gerardus Van Der Sanden, Theo Anjes Maria Ruijl