Patents by Inventor Jacqueline Seto

Jacqueline Seto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing information management system in a plasma processing tool
    Patent number: 8000827
    Abstract: A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: August 16, 2011
    Assignee: Lam Research Corporation
    Inventors: Chad R. Weetman, Chung-Ho Huang, Jacqueline Seto, John Jensen
  • PROCESSING INFORMATION MANAGEMENT SYSTEM IN A PLASMA PROCESSING TOOL
    Publication number: 20100152879
    Abstract: A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.
    Type: Application
    Filed: February 23, 2010
    Publication date: June 17, 2010
    Inventors: Chad R. Weetman, Chung-Ho Huang, Jacqueline Seto, John Jensen