Patents by Inventor Jacques A. Fauqué

Jacques A. Fauqué has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Extended range and ultra precision non contact dimensional gauge for ultra thin wafers and work pieces
    Patent number: 6220080
    Abstract: A method and a system for measurement the geometrical parameters of ultra thin wafers with the thickness less than 200 microns. The measurement system comprises two measurement channels and a computer. Each measurement channel comprises a motor-positionable probe further comprising a back pressure probe and a capacitive probe. The capacitive probe is substantially cocentric with the back pressure probe. The air back pressure sensor is used to calibrate the capacitive sensor for a given dielectric permittivity of the conductive target, and the capacitive sensor is used to measure thickness, flatness, bow, and warpage of the ultra-thin electrically conductive target.
    Type: Grant
    Filed: May 12, 2000
    Date of Patent: April 24, 2001
    Assignee: Sigma Tech, Inc.
    Inventor: Jacques A. Fauqué