Abstract: An ion beam generation device including an ion source, an extraction mechanism for ions emitted by the source, an accelerating mechanism of the ions thus extracted, a selector for the ions thus accelerated, and an electrostatic optical system for focusing the selected ions along a first axis. Further, a mechanism varies the distance between the ion source and the extraction means, this distance being counted along a second axis parallel to the first axis and constituting the axis of the ion beam emitted by the source. The device may be particularly applied to the manufacture of nanostructures.

Abstract: A device for adjusting a beam of charged particles. The device includes an adjustment mechanism for storing desired characteristics for the beam, determining values of adjustment parameters of the apparatus according to its characteristics, storing these values, and giving these stored values to the adjustment parameters of the apparatus. The device can be applied in particular to the manufacturing of nanostructures.

Abstract: Ion beam generation device.

Abstract: A liquid metal ion source includes a cylindrical rod made of an electrically conductive refractory material, ending in a conical pointed end. The cylindrical rod passes through a reservoir of a liquid supply metal. The length of the rod inserted into the reservoir is in electrical contact with the liquid metal in the reservoir, and the reservoir is in contact with a conductive filament. The cylindrical rod, the reservoir and the conductive filament are electrically connected in series.