Patents by Inventor Jacques Van Der Donck

Jacques Van Der Donck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection method and apparatus using same
    Publication number: 20070258086
    Abstract: The invention relates to a method and device of inspecting contamination particles on an object comprising a patterned structure. The device includes a radiation system for directing a radiation beam to the object. The object is configured to scatter the beam. The device also includes an optical system arranged to receive scattered radiation from the object, and a filter provided in the optical system. The filter is associated with the patterned structure so as to filter out radiation from the scattered radiation. The device also includes a detector arranged to detect a fraction of radiation that is transmitted by the filter. Accordingly, contamination particles may be detected quickly and accurately.
    Type: Application
    Filed: May 5, 2006
    Publication date: November 8, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Arno Bleeker, Vadim Banine, Johannes Onvlee, Jacques Van Der Donck, Michiel Oderwald