Abstract: Methods and apparatus for aligning a substrate support are provided herein. In some embodiments, a method of aligning a substrate support includes: measuring a tilt of a substrate support along a direction using a tilt sensor disposed on the substrate support; and determining whether the measured tilt of the substrate support in the direction is less than or equal to a predefined value. In some embodiments, a substrate support alignment system includes: a tilt sensor; and a holding element that holds the tilt sensor and which is locatable on a support surface of a substrate support to locate the tilt sensors in a predetermined orientation with respect to the support surface.