Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

Abstract: A support apparatus comprising an engagement member having a plurality of walls integrally formed with each other and a support member. The support member includes a bracket member pivotably coupled to the engagement member and a leg member pivotably coupled to the bracket member. The bracket member comprises a plurality of fixing apertures corresponding to a fixing member extending from the engagement member. Each fixing aperture is configured to receive the fixing member. A pivot aperture is provided for receiving a pivot member which is configured to be received by a pivot support positioned on the engagement member. A biasing member is coupled to the pivot member such that the pivot member is movable with the bracket member away from the engagement member and such that the bracket member is rotatable when the pivot member is moved away from the engagement member. The leg member is adjustably extendable.

Abstract: An air circulation indicator and method of use includes a rotatable fan blade, and a support structure for securing the rotatable fan blade substantially adjacent to a vent, such that air circulation through the vent rotates the fan blade, thereby indicating the air circulation through the vent. The support structure includes a housing assembly. The housing assembly is integrally formed with the vent. Alternatively, the housing assembly includes an attachment mechanism for attaching the housing assembly to the vent. The attachment mechanism includes a hook which removably attaches the housing assembly to the vent. In another alternative, the support structure includes a clip attachable to the vent, wherein the clip is removably attachable to the vent. The support structure includes a rotatable hub attached to the blade, and a rib extending from the hub to the vent for fixing the hub to the vent.

Abstract: A micro-electro-mechanical system (MEMS) microphone assembly including an enclosure having a top side and a bottom side that define a first chamber having a first volume and an acoustic inlet port formed through one of the top side or the bottom side. The assembly further including a MEMS microphone mounted within the first chamber, the MEMS microphone defining a second chamber having a second volume and a diaphragm having a first side interfacing with the first chamber and a second side interfacing with the second chamber. The assembly also including an acoustically absorbent material within one of the first chamber or the second chamber, the acoustically absorbent material to cause a simulated acoustic enlargement of the first volume or the second volume, respectively.

Abstract: A support apparatus comprising an engagement member having a plurality of walls integrally formed with each other and a support member. The support member includes a bracket member pivotably coupled to the engagement member and a leg member pivotably coupled to the bracket member. The bracket member comprises a plurality of fixing apertures corresponding to a fixing member extending from the engagement member. Each fixing aperture is configured to receive the fixing member. A pivot aperture is provided for receiving a pivot member which is configured to be received by a pivot support positioned on the engagement member. A biasing member is coupled to the pivot member such that the pivot member is movable with the bracket member away from the engagement member and such that the bracket member is rotatable when the pivot member is moved away from the engagement member. The leg member is adjustably extendable.

Abstract: A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.

Abstract: A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.

Abstract: A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.

Abstract: A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.

Abstract: A mobile multi-function device that includes a speaker, two or more microphones, and a beamformer processor is described. The beamformer processor uses the microphones to perform beamforming operations. One of the microphones shares a receiver acoustic opening with the speaker while the other microphone uses a separate acoustic opening. The receiver acoustic opening may be an earpiece opening that is held to the ear of a user while conducting a phone call with the device and provides acoustic input and output paths for the microphone and the speaker, respectively.

Abstract: A micro-electro-mechanical system (MEMS) microphone assembly including an enclosure having a top side and a bottom side that define a first chamber having a first volume and an acoustic inlet port formed through one of the top side or the bottom side. The assembly further including a MEMS microphone mounted within the first chamber, the MEMS microphone defining a second chamber having a second volume and a diaphragm having a first side interfacing with the first chamber and a second side interfacing with the second chamber. The assembly also including an acoustically absorbent material within one of the first chamber or the second chamber, the acoustically absorbent material to cause a simulated acoustic enlargement of the first volume or the second volume, respectively.

Abstract: A mobile multi-function device that includes a speaker, two or more microphones, and a beamformer processor is described. The beamformer processor uses the microphones to perform beamforming operations. One of the microphones shares a receiver acoustic opening with the speaker while the other microphone uses a separate acoustic opening. The receiver acoustic opening may be an earpiece opening that is held to the ear of a user while conducting a phone call with the device and provides acoustic input and output paths for the microphone and the speaker, respectively.

Abstract: A mobile multi-function device that includes a speaker, two or more microphones, and a beamformer processor is described. The beamformer processor uses the microphones to perform beamforming operations. One of the microphones shares a receiver acoustic opening with the speaker while the other microphone uses a separate acoustic opening. The receiver acoustic opening may be an earpiece opening that is held to the ear of a user while conducting a phone call with the device and provides acoustic input and output paths for the microphone and the speaker, respectively.

Abstract: A micro-electro-mechanical system (MEMS) optical sensor, method of detecting sound using the MEMS optical sensor and method of manufacturing. The MEMS optical sensor including a substrate having a base portion and a vertically extending support portion. The sensor further including a top plate having a compliant membrane configured to vibrate in response to acoustic waves, the top plate connected to the support portion and having a reflective surface. The sensor also includes a back plate connected to the support portion, the back plate having a grating portion positioned below the reflective surface portion and a base plate connected to the support portion at a position below the back plate. A light emitter, a light detector and circuitry operable to tilt the top plate and the back plate with respect to the base plate so as to direct the reflected laser light toward the light detector are further provided.

Abstract: System, method, and computer program product to modify a received query, the received query including a first predicate specifying a comparison operator and a second predicate specifying an IS NULL operator, by replacing the comparison operator of the first predicate with an extended comparison operator, and removing the IS NULL operator from the received query, the extended comparison operator configured to support searching of NULL values in a database management system (DBMS), wherein the extended comparison operator is configured to return rows having column data matching a value predefined to represent NULL values.

Abstract: System, method, and computer program product to modify a received query, the received query including a first predicate specifying a comparison operator and a second predicate specifying an IS NULL operator, by replacing the comparison operator of the first predicate with an extended comparison operator, and removing the IS NULL operator from the received query, the extended comparison operator configured to support searching of NULL values in a database management system (DBMS), wherein the extended comparison operator is configured to return rows having column data matching a value predefined to represent NULL values.

Abstract: A micro-electro-mechanical system (MEMS) optical sensor including an enclosure having a top wall, a bottom wall and a sidewall connecting the top wall and the bottom wall. The sensor further including a compliant membrane positioned within the enclosure, which is configured to vibrate in response to an acoustic wave and having a grating formed therein. A reflector is formed directly on an inner surface of one of the bottom wall or the top wall of the enclosure. A light emitter is positioned within the enclosure along a side of the compliant membrane opposite the reflector, the light emitter is configured to transmit a laser light toward the grating and the reflector. A light detector is positioned along the side of the compliant membrane opposite the reflector, the light detector configured to detect an interference pattern of the laser light, which is indicative of an acoustic vibration of the compliant membrane.

Abstract: A micro-electro-mechanical system (MEMS) optical sensor and method of manufacturing a MEMS optical sensor. The MEMS optical sensor may be a MEMS optical microphone including a compliant membrane configured to vibrate in response to an acoustic wave, the compliant membrane having a grating suspended therein. The optical sensor further including a back plate positioned above the compliant membrane, the back plate having a reflector suspended within a center portion of the back plate and aligned with the grating. The optical sensor further including a light emitter positioned below the compliant membrane and configured to transmit a laser light toward the grating and the reflector. The optical sensor also including a light detector configured to detect an interference pattern of the laser light after reflection from the reflector, wherein the interference pattern is indicative of an acoustic vibration of the compliant membrane. Other embodiments are also described and claimed.

Abstract: A micro-electro-mechanical system (MEMS) optical sensor, method of detecting sound using the MEMS optical sensor and method of manufacturing. The MEMS optical sensor including a substrate having a base portion and a vertically extending support portion. The sensor further including a top plate having a compliant membrane configured to vibrate in response to acoustic waves, the top plate connected to the support portion and having a reflective surface. The sensor also includes a back plate connected to the support portion, the back plate having a grating portion positioned below the reflective surface portion and a base plate connected to the support portion at a position below the back plate. A light emitter, a light detector and circuitry operable to tilt the top plate and the back plate with respect to the base plate so as to direct the reflected laser light toward the light detector are further provided.

Abstract: A micro-electro-mechanical system (MEMS) optical sensor, method of detecting sound using the MEMS optical sensor and method of manufacturing. The MEMS optical sensor including a substrate having a base portion and a vertically extending support portion. The sensor further including a top plate having a compliant membrane configured to vibrate in response to acoustic waves, the top plate connected to the support portion and having a reflective surface. The sensor also includes a back plate connected to the support portion, the back plate having a grating portion positioned below the reflective surface portion and a base plate connected to the support portion at a position below the back plate. A light emitter, a light detector and circuitry operable to tilt the top plate and the back plate with respect to the base plate so as to direct the reflected laser light toward the light detector are further provided.