Abstract: A gas purifying system includes a water spraying system, and a collecting apparatus installed downstream of the water spraying system. The collecting apparatus has a surface composed of an electron emitting material, and the electron emitting material is capable of emitting electrons when subjected to visible light, ultraviolet light or electrical energy. The system can also include an ultraviolet lamp, with an ultraviolet photoelectron emitting material surrounding the ultraviolet lamp. The ultraviolet lamp and the ultraviolet photoelectron emitting material are positioned between the water spraying system and the collecting apparatus.

Abstract: A gas purifying system including a water spraying system, and a collecting apparatus installed downstream of the water spraying system. The collecting apparatus has a surface composed of an electron emitting material, and the electron emitting material is capable of emitting electrons when subjected to visible light, ultraviolet light or electrical energy. The system can also include an ultraviolet lamp, with an ultraviolet photoelectron emitting material surrounding the ultraviolet lamp. The ultraviolet lamp and the ultraviolet photoelectron emitting material are positioned between the water spraying system and the collecting apparatus.

Abstract: A monitoring system and method for monitoring a clean room regulating system. The monitoring system includes a particle counter with a pump having a pumping state for pumping a fluid containing particles. The particle counter produces an analog particle signal indicative of an amount of particles detected. The particle counter also produces a pump-state signal corresponding to the pumping state. A signal processor is included for converting the analog particle signal into a first digital signal, for converting the pump-state signal into an analog pumping signal, and for converting the analog pumping signal into a second digital signal. A host computer is included for receiving the first digital signal and deriving the amount of particles detected, for receiving the second digital signal and deriving the pumping state, and for monitoring the pumping state and the amount of particles counted.

Abstract: A monitoring device and a driving control system for a fan filter unit in a semiconductor clean room for monitoring the operating state of the fan filter unit. The monitoring device includes a switching section in each fan filter unit which alternately applies electrical power to one of a plurality of terminals. The switching section is responsive to a force from an air stream introduced therein via rotation of a fan in the fan filter unit. A display section in each fan filter unit is connected to the plurality of terminals which provide different signals, indicative of an on or off state of the fan, according to which of the plurality of terminals is electrically connected to the electrical power.

Abstract: A fan drive checking system, for an air conditioning system in a clean room having a fan filter unit (FFU), includes a flow sensor for sensing air flow inside a housing of a FFU. The sensor provides a sensor signal indicative of normal and adverse flow conditions in the housing. A control portion in data communication with the sensor outputs a control signal responsive to the sensing signal. An alarm in data communication with the control portion provides a warning when the control signal indicates the adverse flow condition.

Abstract: A particle measurer used in a semiconductor clean room includes a funnel-shaped collector for facilitating the measurement of a particle level of an air sample in the clean room. The particle measurer is arranged so that a narrow end part of the funnel-shaped collector is connected to an intake of the particle measurer. A wide end of the funnel-shaped connector receives the air sample through a sample air pipe. A pump is used for suctioning the air sample through the intake of said particle counter and for discharging the air sample through an exhaust.