Abstract: A heterocyclic compound represented by Chemical Formula 1 or 2, and an organic light emitting device including the same, and the heterocyclic compound which is used as a material of an organic material layer of the organic light emitting device and provides improved efficiency, low driving voltage, and improved lifetime characteristics of the organic light emitting device.

Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.

Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.

Abstract: An antenna module is provided. An antenna module according to an exemplary embodiment of the present invention comprises: an antenna unit including an antenna pattern, which has a pattern portion and a lead portion formed, respectively, on both surfaces of a circuit board; a magnetic field shielding sheet including a sheet body made of a magnetic material to block a magnetic field, and a plurality of eddy current reducing pattern portions formed on the sheet body to reduce the generation of eddy current by increasing the resistance of the sheet body; and an insulation member arranged between the antenna unit and the magnetic field shielding sheet, wherein the antenna unit is provided in an asymmetric form in which the pattern portion and the lead portion respectively formed on both surfaces of the circuit board have different thicknesses.

Abstract: A dynamic routing method and apparatus for an Overhead Hoist Transport (OHT) system are disclosed. The present disclosure in some embodiments provides a dynamic routing method for an OHT system, including generating a Q table of records of at least one Q value which is a time for a vehicle to move through an edge between two adjacent nodes to a node other than the two adjacent nodes, measuring a transit time of the vehicle when assigned a destination node and passing a transit edge between a current node and next node, extracting target edges to be updated according to the transit time from a plurality of edges, and differentially updating Q values for the target edges according to distances to the transit edge partially based on the transit time, the Q values for the target edges being time values for the vehicle to move through the target edges to the destination node.

Abstract: Provided is a compound of Formula 1: where X is O or S; Ar1 is an aryl having 6 to 20 carbon atoms substituted with at least one functional group selected from the group consisting of cyano, pyridinyl, benzimidazolyl and diphenylphosphine oxide, or a substituted or unsubstituted heteroaryl having 3 to 20 carbon atoms containing at least one N; and Ar2 is a functional group of Formula 2 below, with the proviso that Ar1 and Ar2 are different from each other, where Ar3 is an aryl having 6 to 20 carbon atoms, and m is an integer of 0 to 2, and an organic light emitting device comprising the same.

Abstract: A display device including: a display panel; a first substrate attached to a side of the display panel; and a second substrate attached to a side of the first substrate, wherein the display panel includes a first panel test pad and a second panel test pad, the first substrate includes a 1-1 circuit test lead overlapping and connected to the first panel test pad, a 1-2 circuit test lead overlapping and connected to the second panel test pad, a 2-1 circuit test lead overlapping and connected to the second substrate, a 1-1 test lead line connected to the 1-1 circuit test lead, a 1-2 test lead line connected to the 1-2 circuit test lead, and a first test lead line connected to the 2-1 circuit test lead, and the 1-1 test lead line and the 1-2 test lead line are connected to the first test lead line.

Abstract: Disclosed is a combo antenna module in which an accommodation groove is formed in a coil pattern and a connection pattern connected to a coil pattern disposed on another surface is disposed in the accommodation groove so as to minimize a mounting space and provide antenna performance greater than or equal to that of a conventional antenna module. The disclosed combo antenna module comprises a coil pattern for short-range communication and a coil pattern for wireless power transmission. The coil pattern for wireless power transmission has the accommodation groove formed by varying the line width of the coil pattern disposed on one surface, and the connection pattern for connecting the coil patterns disposed on the other surface is disposed in the accommodation groove so as to minimize a mounting space and provide antenna performance greater than or equal to that of a conventional antenna module.

Abstract: A chemical mechanical polishing (CMP) apparatus includes a polishing pad on a polishing platen, a polishing head on the polishing pad, the polishing head having a membrane to hold a wafer on the polishing pad, and a polishing slurry feeding line to feed a polishing slurry, and a retainer ring around the membrane and in contact with the polishing pad to prevent detachment of the wafer, the retainer ring including a polishing slurry feeding inlet connected to the polishing slurry feeding line to feed the polishing slurry onto the polishing pad.

Abstract: A wafer cleaning apparatus, a method of cleaning wafer and a method of fabricating a semiconductor device are provided. The method of fabricating the semiconductor device includes disposing a wafer on a rotatable chuck, irradiating a lower surface of the wafer with a laser to heat the wafer, and supplying a chemical to an upper surface of the wafer to clean the wafer, wherein the laser penetrates an optical system including an aspheric lens array, the laser penetrates a calibration window, which includes a first window structure including a first light projection window including first and second regions different from each other, a first coating layer covering the first region of the first light projection window, and a second coating layer covering the second region of the first light projection window, and the first coating layer and the second coating layer have different light transmissivities from each other.

Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.

Abstract: Provided are a large area type complex magnetic field shielding sheet and a wireless power transfer module including the same. A large area type complex magnetic field shielding sheet wherein at least one of an overall width, an overall length, and a diameter is 100 mm or more may include a main shielding layer arranged so that a plurality of ferrite block bodies each having a predetermined area are adjacent to each other, and an auxiliary shielding layer formed of at least one magnetic sheet having a predetermined area and laminated on the main shielding layer through an adhesive layer, wherein a boundary region between two ferrite block bodies disposed to be adjacent each other is disposed to be located in an inner region of the magnetic sheet and thus a magnetic field which leaks into a gap between the two ferrite block bodies is blocked by the magnetic sheet.

Abstract: A tacrolimus drug-eluting stent manufacturing method according to the present invention enables a tacrolimus drug to be strongly and stably bound onto a stent, while also not necessarily involving a separate step of introducing a surface-binding functional group for the binding of a drug onto a stent and a step of introducing, into the drug, a functional group capable of binding to the surface-binding functional group, and a tacrolimus drug-eluting stent manufactured by the manufacturing method has a greater total drug elution amount and has a more excellent delayed drug-elution property.

Abstract: A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.

Abstract: Proposed is a combo antenna module which laminates a loop coil and an antenna sheet to configure a combo antenna, thereby preventing the degree of design freedom from being lowered and minimizing the manufacturing cost. The proposed combo antenna module includes a magnetic sheet, a loop coil disposed on the upper surface of the magnetic sheet, and an antenna sheet having the area smaller than that of the magnetic sheet, and disposed on the upper surface of the magnetic sheet, in which the antenna sheet overlaps a part of the loop coil.

Abstract: Provided are a roll-shaped magnetic field shielding sheet, a method of manufacturing a magnetic field shielding sheet, and an antenna module using the same, which can improve the efficiency of the overall production process by improving a heat treatment process for a thin film magnetic sheet. The magnetic field shielding sheet includes: at least one thin film magnetic sheet; an insulating layer or insulating layers formed on one or either side of the at least one thin film magnetic sheet; and an adhesive layer formed between the insulating layers of the adjacent thin film magnetic sheets to laminate and bond the thin film magnetic sheets, wherein the thin film magnetic sheet is flake-treated to be divided into a plurality of magnetic substance fragments.

Abstract: The present invention relates to an organic light emitting device comprising a light emitting layer and an electron transport layer which satisfy the following mathematical expressions, EHOMO-ET>EHOMO-BH and ELUMO-ET>ELUMO-GH, and having improved driving voltage, efficiency, and lifetime.

Abstract: A wafer cleaning apparatus, a method of cleaning wafer and a method of fabricating a semiconductor device are provided. The method of fabricating the semiconductor device includes disposing a wafer on a rotatable chuck, irradiating a lower surface of the wafer with a laser to heat the wafer, and supplying a chemical to an upper surface of the wafer to clean the wafer, wherein the laser penetrates an optical system including an aspheric lens array, the laser penetrates a calibration window, which includes a first window structure including a first light projection window including first and second regions different from each other, a first coating layer covering the first region of the first light projection window, and a second coating layer covering the second region of the first light projection window, and the first coating layer and the second coating layer have different light transmissivities from each other.

Abstract: A display device includes a pixel array disposed in a display area, a connection pad disposed in a pad area, and a transfer wiring electrically connected to the connection pad to transfer a signal to the pixel array. The pixel array includes a light-emitting element including a first electrode including a multi-layered structure including a metal layer and a metal oxide layer, an organic light-emitting layer disposed on the first electrode, and a second electrode disposed on the organic light-emitting layer. The connection pad includes an upper pad conductive layer having a single-layered structure including a metal oxide.

Abstract: Provided is a novel heterocyclic compound of Chemical Formula 1: and to an organic light emitting device including the same.