Patents by Inventor Jae Suk Heo

Jae Suk Heo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High-tech temperature control device for semiconductor manufacturing facility
    Patent number: 10692748
    Abstract: The present invention relates to a high-tech temperature control device for a semiconductor manufacturing facility and, more specifically, to a high-tech temperature control device for an electrostatic chuck, which supports a wafer and maintains the temperature in a semiconductor wafer processing process. It is possible to very precisely control a temperature of an electrostatic chuck by maintaining temperatures and a mixing flow rate of a heating heat medium and a cooling heat medium constant and adjusting a mixing ratio. Meanwhile, the heat medium after heating and cooling is collected and reused, thereby efficiently using energy.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: June 23, 2020
    Assignee: GLOBAL STANDARD TECHNOLOGY CO., LTD.
    Inventors: Jong Bae Kim, Seung Jin Yang, Jae Suk Heo, Chi Won Choi, Je Min Kim, Hyeung Kwan Kim, Yong Ho Choi
  • HIGH-TECH TEMPERATURE CONTROL DEVICE FOR SEMICONDUCTOR MANUFACTURING FACILITY
    Publication number: 20180158710
    Abstract: The present invention relates to a high-tech temperature control device for a semiconductor manufacturing facility and, more specifically, to a high-tech temperature control device for an electrostatic chuck, which supports a wafer and maintains the temperature in a semiconductor wafer processing process. It is possible to very precisely control a temperature of an electrostatic chuck by maintaining temperatures and a mixing flow rate of a heating heat medium and a cooling heat medium constant and adjusting a mixing ratio. Meanwhile, the heat medium after heating and cooling is collected and reused, thereby efficiently using energy.
    Type: Application
    Filed: December 1, 2017
    Publication date: June 7, 2018
    Inventors: Jong Bae Kim, Seung Jin Yang, Jae Suk Heo, Chi Won Choi, Je Min Kim, Hyeung Kwan Kim, Yong Ho Choi