Abstract: A deposition apparatus for depositing a deposition material on a base substrate disposed on a mask, includes: a mask assembly including a mask frame which defines an opening therein and surrounds the opening, and the mask disposed on the mask frame; an electrostatic chuck disposed on the base substrate; and a plate disposed on the electrostatic chuck. The electrostatic chuck includes a plurality of magnetic bodies, and a magnetic property of at least one magnetic body among the plurality of magnetic bodies is different from a magnetic property of remaining magnetic bodies except for the at least one magnetic body among the plurality of magnetic bodies.

Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 ?m to 4,000 ?m.

Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 ?m to 4,000 ?m.

Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 ?m to 4,000 ?m.

Abstract: A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

Abstract: A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 ?m to 4,000 ?m.

Abstract: Disclosed is an apparatus and method for ejecting droplets using charge concentration and liquid bridge breakup. The droplet ejection apparatus includes a reservoir storing a liquid; a capillary nozzle having a lower end submerged in the liquid stored in the reservoir and an upper end exposed outside the surface of the liquid, the capillary nozzle transferring the liquid to the upper end using capillary force; a potentiostat for applying a voltage to the liquid; a substrate mount on which a substrate is disposed to face the upper end of the capillary nozzle; and a distance adjusting unit for reciprocatingly moving the substrate between first and second positions with respect to the capillary nozzle, wherein the first position denotes a position where a distance between the upper end of the capillary nozzle and the surface of the substrate is less than a effective distance.

Abstract: Disclosed is an apparatus and method for ejecting droplets using charge concentration and liquid bridge breakup. The droplet ejection apparatus includes a reservoir storing a liquid; a capillary nozzle having a lower end submerged in the liquid stored in the reservoir and an upper end exposed outside the surface of the liquid, the capillary nozzle transferring the liquid to the upper end using capillary force; a potentiostat for applying a voltage to the liquid; a substrate mount on which a substrate is disposed to face the upper end of the capillary nozzle; and a distance adjusting unit for reciprocatingly moving the substrate between first and second positions with respect to the capillary nozzle, wherein the first position denotes a position where a distance between the upper end of the capillary nozzle and the surface of the substrate is less than a effective distance.

Abstract: Disclosed is an apparatus and method for ejecting droplets using charge concentration and liquid bridge breakup. The droplet ejection apparatus includes a reservoir storing a liquid; a capillary nozzle having a lower end submerged in the liquid stored in the reservoir and an upper end exposed outside the surface of the liquid, the capillary nozzle transferring the liquid to the upper end using capillary force; a potentiostat for applying a voltage to the liquid; a substrate mount on which a substrate is disposed to face the upper end of the capillary nozzle; and a distance adjusting unit for reciprocatingly moving the substrate between first and second positions with respect to the capillary nozzle, wherein the first position denotes a position where a distance between the upper end of the capillary nozzle and the surface of the substrate is less than a effective distance.

Abstract: Disclosed is an apparatus and method for ejecting droplets using charge concentration and liquid bridge breakup. The droplet ejection apparatus includes a reservoir storing a liquid; a capillary nozzle having a lower end submerged in the liquid stored in the reservoir and an upper end exposed outside the surface of the liquid, the capillary nozzle transferring the liquid to the upper end using capillary force; a potentiostat for applying a voltage to the liquid; a substrate mount on which a substrate is disposed to face the upper end of the capillary nozzle; and a distance adjusting unit for reciprocatingly moving the substrate between first and second positions with respect to the capillary nozzle, wherein the first position denotes a position where a distance between the upper end of the capillary nozzle and the surface of the substrate is less than a effective distance.