Abstract: In a piezoelectric actuator for an ink-jet printhead, and a method of forming the same, formed on a flow path plate having a pressurizing chamber, the piezoelectric actuator for applying a driving force for ink ejection to the pressurizing chamber, the piezoelectric actuator includes a lower electrode formed on the flow path plate, a bonding pad formed on the flow path plate to be insulated from the lower electrode, wherein a driving circuit for voltage application is bonded to an upper surface of the bonding pad, a piezoelectric layer formed on the lower electrode at a position corresponding to the pressurizing chamber, wherein an end of the piezoelectric layer extends onto the bonding pad, and an upper electrode formed on the piezoelectric layer, wherein an end of the upper electrode extends beyond the end of the piezoelectric layer and contacts the upper surface of the bonding pad.

Abstract: A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber.

Abstract: A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.

Abstract: A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

Abstract: A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

Abstract: A piezoelectric inkjet printhead having a channel forming plate including an ink channel having a pressure chamber coupled to a nozzle, a piezoelectric actuator including a lower electrode on the channel forming plate, a piezoelectric element on the lower electrode, and an upper electrode on the piezoelectric element, the piezoelectric actuator corresponding to the pressure chamber, an insulation element on the lower electrode and spaced apart from the piezoelectric element, a first electrode on the insulation element, and a temperature sensor on the first electrode, and a method of making the same.

Abstract: A defect detection device of a printer head, and a method of detecting defects, including first to Nth actuators providing a driving force for ejecting ink to ink chambers; a vibration signal generator generating vibration signals for vibrating the first to Nth actuators; a first switch receiving the generated vibration signals and outputting the vibration signals to a Kth actuator among the first to Nth actuators; a second switch receiving vibration signals of one or more among the first to Nth actuators and outputting an Lth vibration signal that corresponds to a vibration signal of the Lth actuator adjacent to the Kth actuator among the received vibration signals; and a defect detector comparing the Lth vibration signal output from the second switch with the specific vibration signal of the Lth actuator when there is no defect in a printer head and detecting defects in the printer head.

Abstract: An inkjet printing device includes a flow path plate comprising a manifold to supply ink, a pressure chamber filled with the ink supplied from the manifold, and a nozzle via which the ink is ejected, a piezoelectric actuator which is disposed on a top surface of the flow path plate and includes a lower electrode, a piezoelectric layer, and an upper electrode that are stacked sequentially, a first electrostatic electrode to generate an electrostatic field, and a second electrostatic electrode which is disposed a predetermined distance apart from a bottom surface of the flow path plate to generate the electrostatic field between the first electrostatic electrode and the second electrostatic electrode.

Abstract: A piezoelectric inkjet printhead capable of reducing a crosstalk and a method of manufacturing the same are provided. The inkjet printhead includes an upper substrate, an intermediate substrate, and a lower substrate that are sequentially stacked, wherein the upper substrate includes piezoelectric actuators on an upper surface of the upper substrate and pressure chambers and first restrictors on a lower surface of the upper substrate, the first restrictors extending from the pressure chambers and having a width smaller than a width of the pressure chambers, the intermediate substrate includes dampers passing therethrough, the dampers corresponding to the pressure chambers and second restrictors extending between the first restrictors and a manifold formed from a lower surface of the intermediate substrate and the lower substrate includes nozzles passing therethrough, the nozzles corresponding to the dampers.

Abstract: A method for controlling a batch-type semiconductor processing apparatus is provided. The method checks whether a recipe set based on basic process information is within a recipe group stored in the semiconductor processing apparatus. The method also checks whether the quantity of wafers read through lot mapping is correlated to the quantity of wafers indicated by the basic process information. During the semiconductor fabrication process, the method also checks whether a current recipe of the semiconductor processing apparatus is correlated to the set recipe.

Abstract: An inkjet printhead assembly including an inkjet printhead chip having an ink inflow hole, a frame having an ink supply hole, and an ink supply apparatus having a preheater and an ink supply outlet, wherein the frame is disposed between the inkjet printhead chip and the ink supply apparatus, the inkjet printhead chip is attached to the frame, and the ink supply hole is disposed between the ink supply outlet and the ink inflow hole, so as to channel ink between the ink supply apparatus and the inkjet printhead chip.

Abstract: In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.

Abstract: A system and method of transferring wafers by the lot to a vertical furnace are disclosed. The method includes receiving batch information related to a track-in operation and storing the batch information in a memory associated with the vertical furnace, wherein the batch information identifies a plurality of lots, sequentially transferring a plurality of carriers associated with the plurality of lots from an 1/0 port of the vertical furnace to a carrier stocker, transferring at least one of the plurality of carriers from the stock carrier to a wafer transfer stage before the carrier stocker receives all of the carriers in the plurality of carriers, and transferring wafers from at least one of the plurality of carriers from the wafer transfer stage to wafer boat.

Abstract: The present invention relates to a plasticizer composition containing cyclodextrin derivatives, a flexible PVC composition with suppression of the migration of plasticizer containing this plasticizer composition, and a manufacturing method of the PVC composition. The manufacturing method includes the steps of: (S1) preparing a cyclodextrin derivative, in which hydrogens of a cyclodextrin are substituted with a certain compound; (S2) mixing the cyclodextrin derivative, PVC and a low molecular weight liquid plasticizer to form a plastisol; and (S3) heating the plastisol into liquid and cooling the plastisol. This manufacturing method uses cyclodextrin derivatives, in which cyclodextrins are modified with certain compounds, and these derivatives form a complex with the low molecular weight liquid plasticizer to suppress plasticizer migration. Thus, this method thereby allows mass-production of the flexible PVC with suppressed plasticizer migration in a simple and economical manner without using a solvent.

Abstract: A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate.

Abstract: An inkjet printhead that uses a non-aqueous ink. The inkjet printhead includes a flow channel plate having an ink channel, and a nozzle plate which is combined with the flow channel plate and has a plurality of nozzles through which the non-aqueous ink is ejected, wherein a non-wetting coating film is formed on inner walls of the ink channel and the nozzles.

Abstract: A nozzle plate usable with an inkjet printhead includes a substrate through which a plurality of nozzles are formed, an ink-philic material layer formed on an outer surface of the substrate and inner walls of the nozzles, and a plurality of nonwetting coating layers sequentially formed on the ink-philic material layer formed on the outer surface of the substrate, each nonwetting coating layer including an adhesive layer and an ink-phobic material layer deposited on the adhesive layer.

Abstract: A method of driving an ink-jet printhead, the ink-jet printhead having a pressure chamber to be filled with ink, a piezoelectric actuator for varying a volume of the pressure chamber, and a nozzle, through which an ink droplet is ejected, connected to the pressure chamber, the method including applying a driving pulse to the piezoelectric actuator to change the volume of the pressure chamber, thereby ejecting the ink droplet through the nozzle due to a change in pressure in the pressure chamber caused by the change in volume of the pressure chamber, and changing a volume of the ink droplet ejected through the nozzle by maintaining a rising time of the driving pulse constant and adjusting a duration time of a maximum voltage of the driving pulse.

Abstract: An inkjet head including a plurality of restrictors to reduce crosstalk. The inkjet head includes a channel plate in which an ink channel is formed, an actuator formed on the channel plate, and an ink-supply bezel including a manifold. The ink channel includes an ink inlet to receive ink from the manifold, reservoirs to store ink received through the ink inlet, chambers filled with ink supplied from the reservoirs, nozzles to eject ink filled in the chambers, first restrictors connecting the reservoirs to the chambers, and second restrictors connecting the reservoirs to the ink inlet. Each of the reservoirs includes a first reservoir and a second reservoir that are separated by a central separation wall, and the separation wall includes a third restrictor connecting the first and second reservoirs. Therefore, crosstalk caused by a back flow of ink and transmission of a pressure wave can be prevented during ejection of ink.

Abstract: A restrictor with a structure to prevent a back flow of ink and an inkjet head including the restrictor. In the inkjet head, an ink channel is formed in a channel plate, and the ink channel includes an ink inlet, a plurality of pressure chambers, a manifold, a plurality of restrictors respectively connecting the pressure chambers to the manifold, and a plurality of nozzles. Piezoelectric actuators are formed on the channel plate. Each of the restrictors includes a plurality of protrusions formed on an inner surface thereof in a structure suitable to increase a flow resistance of the restrictor when ink flows from the pressure chamber to the manifold through the restrictor. Each of the protrusions includes a first surface facing a flow of ink moving through the restrictor in a direction from the manifold to the pressure chamber, and a second surface facing a flow of ink moving through the restrictor in a direction from the pressure chamber to the manifold.