Abstract: Disclosed are an RF MEMS switch and a fabrication method thereof. According to an embodiment the RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electric energy when an electric field is applied to the piezoelectric capacitor. A cap substrate can be formed by using an etching method, a chemical mechanical polishing method, an electroplating method, etc., and the RF MEMS switch has a high reliability and a high yield.

Abstract: Disclosed are an RF MEMS switch and a fabrication method thereof. According to an embodiment the RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electric energy when an electric field is applied to the piezoelectric capacitor. A cap substrate can be formed by using an etching method, a chemical mechanical polishing method, an electroplating method, etc., and the RF MEMS switch has a high reliability and a high yield.

Abstract: An antenna for ultra-wide band communication is disclosed. The antenna includes a substrate, a patch formed on one side of the substrate so as to be smaller than the substrate, and being excited when an electric current is supplied through a feeder line, so as so radiate energy, and a ground area formed by removing a portion of another side of the substrate so as to obtain a wide band characteristic.

Abstract: Disclosed are an RF MEMS switch and a fabrication method thereof. The RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electric energy when an electric field is applied to the piezoelectric capacitor. A cap substrate is formed by using an etching method, a chemical mechanical polishing method, an electroplating method, etc., and the RF MEMS switch has a high reliability and a high yield.

Abstract: Disclosed is a wireless internal antenna for a home network and digital electric home appliance which comprises: a wireless antenna for a client having a tuning slot at an upper surface of a client device to realize an impedance matching at a band of IEEE802.11b (a band of 2.4 GHz) and having a certain type patch pole at a lower surface of the client device to have return characteristics at a band of IEEE802.11a (a band of 5 GHz); and a wireless antenna for a server, enabling transmission/reception to/from the client device, having an air slot at an upper surface of a server device and a feeding line at a lower surface thereof, and the server device is supported at a ground plate by a supporting portion installed at a lower part thereof.

Abstract: A low voltage micro switch includes a substrate having an actuating space therein; an actuating unit having a piezoelectric material extended in a cantilever beam shape from a portion of the substrate to the actuating space of the substrate and a bias electrode; a conductive signal line extendedly formed at a certain interval from one side of the substrate and having a disconnected portion; a supporting unit connected to the actuating unit, positioned in the actuating space, and moving according to actuation of the actuating unit; a switching unit formed at the supporting unit and connecting or disconnecting the disconnected portion of the conductive signal line according to movement of the supporting unit; and one or more ground units formed at the substrate.

Abstract: A photonic band gap coplanar waveguide transmission line and a method for fabricating a power divider using the same capable of increasing a characteristic impedance, increasing a signal line width of the transmission line and providing high power, includes: a ground conductive layer formed on a substrate; linear grooves formed on the ground conductive layer; a signal line formed between linear grooves; rectangular grooves formed close to the signal line, and formed on the ground conductive layer; and slots formed at the rectangular grooves respectively, and connecting the rectangular groove and the linear groove.

Abstract: Micromirror in a cross-connect switch for an optical communication system, and method for fabricating the same, the micromirror including a rotatable mirror rotatable in an X-axis direction for reflecting an incident light at a predetermined angle, rotatable beams around the rotatable mirror each connected to the rotatable mirror for rotating in a Y-axis direction together with the rotatable mirror, supporting posts around the rotatable beams each connected to the rotatable beam for supporting the rotatable beams, and a driving part on a bottom of the rotatable mirror for rotating the rotatable mirror and/or the rotatable beams as a voltage is provided thereto.

Abstract: Disclosed are an RF MEMS switch and a fabrication method thereof. The RF MEMS switch is actuated with a low voltage and a low consumption power by using a piezoelectric capacitor actuated by being converted to mechanical energy from electric energy when an electric field is applied to the piezoelectric capacitor. A cap substrate is formed by using an etching method, a chemical mechanical polishing method, an electroplating method, etc., and the RF MEMS switch has a high reliability and a high yield.

Abstract: Disclosed are a film bulk acoustic resonator, a duplexer filter having the same, and a semiconductor package thereof. The film bulk acoustic resonator comprising: a semiconductor substrate; a lower electrode more than two layers formed at an upper surface of the semiconductor substrate; a piezoelectric layer deposited on an upper surface of the lower electrode with a certain thickness; and an upper electrode more than two layers formed at an upper surface of the piezoelectric layer, has an excellent bonding characteristic. The duplexer filter can microminiaturize a size thereof by integrating a film bulk acoustic filter formed by connecting the plurality of film bulk acoustic resonators serially and in parallel and peripheral passive elements of the film bulk acoustic filter into one semiconductor chip. Also, the semiconductor package is suitable for the duplexer filter.

Abstract: Disclosed is a wireless internal antenna for a home network and digital electric home appliance which comprises: a wireless antenna for a client having a tuning slot at an upper surface of a client device to realize an impedance matching at a band of IEEE802.11b (a band of 2.4 GHz) and having a certain type patch pole at a lower surface of the client device to have return characteristics at a band of IEEE802.11a (a band of 5 GHz); and a wireless antenna for a server, enabling transmission/reception to/from the client device, having an air slot at an upper surface of a server device and a feeding line at a lower surface thereof, and the server device is supported at a ground plate by a supporting portion installed at a lower part thereof.

Abstract: An antenna for ultra-wide band communication is disclosed. The antenna includes a substrate, a patch formed on one side of the substrate so as to be smaller than the substrate, and being excited when an electric current is supplied through a feeder line, so as so radiate energy, and a ground area formed by removing a portion of another side of the substrate so as to obtain a wide band characteristic.

Abstract: A low voltage micro switch includes a substrate having an actuating space therein; an actuating unit having a piezoelectric material extended in a cantilever beam shape from a portion of the substrate to the actuating space of the substrate and a bias electrode; a conductive signal line extendedly formed at a certain interval from one side of the substrate and having a disconnected portion ; a supporting unit connected to the actuating unit, positioned in the actuating space, and moving according to actuation of the actuating unit; a switching unit formed at the supporting unit and connecting or disconnecting the disconnected portion of the conductive signal line according to movement of the supporting unit; and one or more ground units formed at the substrate.

Abstract: Disclosed are an active smart antenna system and a method thereof. The system comprises: an antenna for receiving a signal; a low noise amplifier for amplifying a signal received through the antenna so as to minimize a noise generation; and a phase shifter for controlling a phase of the amplified signal. The antenna, the low noise amplifier, and the phase shifter are formed on one high resistance substrate.

Abstract: Disclosed are a film bulk acoustic resonator, a duplexer filter having the same, and a semiconductor package thereof. The film bulk acoustic resonator comprising: a semiconductor substrate; a lower electrode more than two layers formed at an upper surface of the semiconductor substrate; a piezoelectric layer deposited on an upper surface of the lower electrode with a certain thickness; and an upper electrode more than two layers formed at an upper surface of the piezoelectric layer, has an excellent bonding characteristic. The duplexer filter can microminiaturize a size thereof by integrating a film bulk acoustic filter formed by connecting the plurality of film bulk acoustic resonators serially and in parallel and peripheral passive elements of the film bulk acoustic filter into one semiconductor chip. Also, the semiconductor package is suitable for the duplexer filter.

Abstract: A photonic band gap coplanar waveguide transmission line and a method for fabricating a power divider using the same capable of increasing a characteristic impedance, increasing a signal line width of the transmission line and providing high power, includes: a ground conductive layer formed on a substrate; linear grooves formed on the ground conductive layer; a signal line formed between linear grooves; rectangular grooves formed close to the signal line, and formed on the ground conductive layer; and slots formed at the rectangular grooves respectively, and connecting the rectangular groove and the linear groove.

Abstract: A multi-bit phase shifter suitably used for a satellite broadcasting and a satellite communication band includes one or a plurality of phase shifters each having a short stub with an end short and an MEMS (Micro Electro Mechanical System) switch formed at the end of the short stub and controlling an impedance value. A processing cost and an insertion loss can be reduced, a driving voltage can be lowered, a wider bandwidth can be obtained, and uniform phase characteristics can be obtained.

Abstract: A material sensing sensor using a thin film bulk acoustic resonator having a compact size and a high material measurement sensitivity is formed together with other material sensing sensors in an array form, and integrated with a signal processor on the same board, to thereby precisely sensing a plurality of materials, and a material sensing module. The material sensing sensor using a thin film bulk acoustic resonator (TFBAR) includes: a first thin film bulk acoustic resonator for generating a first resonant frequency according to the amount and/or thickness of a target material; and a reference thin film bulk acoustic resonator for generating a reference resonant frequency.

Abstract: Disclosed is an inductor for a radio communication module enabling to be less affected by parasitics of a substrate as well as have a great cross-sectional area. The present invention includes a plurality of first and second conductive pads on a substrate, a plurality of first conductive bonding wires connecting the first and second conductive pads in diagonal directions, respectively, and a plurality of second conductive bonding wires connecting the first and second conductive pads confronting each other, respectively.

Abstract: Micromirror in a cross-connect switch for an optical communication system, and method for fabricating the same, the micromirror including a rotatable mirror rotatable in an X-axis direction for reflecting an incident light at a predetermined angle, rotatable beams around the rotatable mirror each connected to the rotatable mirror for rotating in a Y-axis direction together with the rotatable mirror, supporting posts around the rotatable beams each connected to the rotatable beam for supporting the rotatable beams, and a driving part on a bottom of the rotatable mirror for rotating the rotatable mirror and/or the rotatable beams as a voltage is provided thereto.