Abstract: Provided are a process gas supply device, which stably controls a temperature of a process gas to supply the process gas, and a substrate processing system including the same. The process gas supply device includes a gas hub to which a process gas is supplied from a gas supply source, a plurality of gas lines branched from the gas hub to transfer the supplied process gas, and an integrated heater part provided to surround the plurality of gas lines and the gas hub so as to heat the gas hub and the plurality of gas lines at the same time.

Abstract: Provided is a substrate processing apparatus, more particularly, a substrate processing apparatus capable of suppressing an generation of process by-products in a substrate processing process. A substrate processing apparatus includes a chamber part configured to provide an inner space in which a substrate is processed, a gas supply part configured to supply a process gas to the inner space, a substrate support configured to support the substrate, a heating liner provided inside the chamber part to at least partially surround the inner space, and a heating part configured to heat the heating liner.

Abstract: Provided are a substrate processing apparatus and a substrate processing method, which are capable of independently performing processes on a plurality of substrates in a multi-station chamber.

Abstract: A gas diffuser plate in a cyclic deposition chamber is disclosed. The gas diffuser plate as fabricated comprises a substrate diffuser plate having a substrate emissivity and a coating formed on the substrate diffuser plate. The gas diffuser plate having the substrate diffuser plate coated with the coating has an emissivity higher than the substrate emissivity. The coating comprises a first layer formed on the substrate diffuser plate and comprising a first material configured to modulate the emissivity of the gas diffuser plate, and a second layer comprising a second corrosion-resistant material. The first material comprises titanium nitride oxide (TiNxOy). The emissivity of the gas diffuser plate is at least partially based on the ratio of nitrogen and oxygen in TiNxOy.

Abstract: A mobile terminal includes a first body, a second body, and a slide-tilt module that slides the first body relative to the second body within a first section and tilts the first body to a preset angle relative to the second body within a second section, the slide-tilt module including a sliding unit to slidably connect the first body and the second body to each other and a tilting unit to tilt the first body to the preset angle, such that the tilting unit is inactive and the first body is slid in the first section, and the tilting unit is activated in the second section such that the first body is tilted.

Abstract: Disclosed is a portable terminal, including, a first conductor formed on one surface of a board and having a contact surface, a second conductor formed at an outer periphery of the first conductor and having a support surface, and a metal dome supported by the support surface and transformed responsive to a key being pressed so as to contact the contact surface, wherein the contact surface is located at a position lower than the support surface so as to increase a transformation stroke of the metal dome.

Abstract: A mobile terminal includes a first body, a second body, and a slide-tilt module that slides the first body relative to the second body within a first section and tilts the first body to a preset angle relative to the second body within a second section, the slide-tilt module including a sliding unit to slidably connect the first body and the second body to each other and a tilting unit to tilt the first body to the preset angle, such that the tilting unit is inactive and the first body is slid in the first section, and the tilting unit is activated in the second section such that the first body is tilted.

Abstract: Disclosed is a portable terminal, including, a first conductor formed on one surface of a board and having a contact surface, a second conductor formed at an outer periphery of the first conductor and having a support surface, and a metal dome supported by the support surface and transformed responsive to a key being pressed so as to contact the contact surface, wherein the contact surface is located at a position lower than the support surface so as to increase a transformation stroke of the metal dome.