Patents by Inventor Jaeseong SHIN

Jaeseong SHIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Focus ring with uneven pattern and plasma-processing apparatus including the same
    Patent number: 10600622
    Abstract: A focus ring includes a main body and a plurality of unit structures. The main body has a ring shape. The unit structures are arranged in an uneven pattern and protrude from an upper surface of the main body.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: March 24, 2020
    Assignee: SAMUSUNG ELECTRONICS CO., LTD.
    Inventor: Jaeseong Shin
  • FOCUS RING AND PLASMA-PROCESSING APPARATUS INCLUDING THE SAME
    Publication number: 20180190475
    Abstract: A focus ring includes a main body and a plurality of unit structures. The main body has a ring shape. The unit structures are arranged in an uneven pattern and protrude from an upper surface of the main body.
    Type: Application
    Filed: August 22, 2017
    Publication date: July 5, 2018
    Inventor: Jaeseong SHIN