Abstract: A gimbal assembly that can be used in conjunction with semiconductor fabrication tools, such as chemical-mechanical polishing (CMP) tools, as well as other types of tools, is disclosed. A gimbal assembly may include a gimbal hub, a pivot head plate, a gimbal sleeve, and a gimbal post. The gimbal hub has an interior cavity. The pivot head plate has a ball head, a base, and an outer edge, where the base is situated in the bottom of the interior cavity. The gimbal sleeve is situated in the bottom of the interior cavity over the outer edge of the pivot head plate, securing the pivot head plate in place within the interior cavity. The gimbal post is situated over the ball head of the pivot head plate. The ball head of the pivot head plate preferably has dual diameters.

Abstract: A novel apparatus and method for transporting semiconductor wafer substrates typically from a CMP apparatus to a scrubber cleaner in a dry state. The method includes providing a SMIF arm at the input port of the scrubber cleaner. After they are subjected to the CMP operation, the substrates are loaded into an enclosed substrate carrier such as a cassette or pod and transported to the SMIF arm of the scrubber cleaner at the input port, where the substrates are internalized and subjected to rinsing, scrubbing and drying steps in the cleaner. Automated transport of the dry substrates from the CMP apparatus to the scrubber cleaner in an enclosed substrate carrier prevents atmospheric particles from contaminating the substrates, prevents unnecessary use of manpower, and reduces or eliminates the possibility of breakage or damage to the substrates.

Abstract: A gimbal assembly that can be used in conjunction with semiconductor fabrication tools, such as chemical-mechanical polishing (CMP) tools, as well as other types of tools, is disclosed. A gimbal assembly may include a gimbal hub, a pivot head plate, a gimbal sleeve, and a gimbal post. The gimbal hub has an interior cavity. The pivot head plate has a ball head, a base, and an outer edge, where the based is situated in the bottom of the interior cavity. The gimbal sleeve is situated in the bottom of the interior cavity over the outer edge of the pivot head plate, securing the pivot head plate in place within the interior cavity. The gimbal post is situated over the ball head of the pivot head plate. The ball head of the pivot head plate preferably has dual diameters.