Patents by Inventor Jaime Onate

Jaime Onate has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTROSTATIC CHUCK ASSEMBLY WITH CAPACITIVE SENSE FEATURE, AND RELATED OPERATING METHOD
    Publication number: 20100008016
    Abstract: A semiconductor workpiece processing system for treating a workpiece, such as a semiconductor wafer, is provided. A related operating control method is also provided. The system includes an electrostatic chuck configured to receive a workpiece, and a clamping voltage power supply coupled to the electrostatic chuck. The electrostatic chuck has a clamping electrode assembly, and the clamping voltage power supply is coupled to the clamping electrode assembly. The clamping voltage power supply includes a direct current (DC) voltage generator configured to generate a DC clamping voltage for the clamping electrode assembly, an alternating current (AC) voltage generator configured to generate an AC excitation signal for the clamping electrode assembly, and a processing architecture coupled to the clamping electrode assembly.
    Type: Application
    Filed: July 7, 2009
    Publication date: January 14, 2010
    Applicant: NOVELLUS SYSTEMS, INC.
    Inventors: Jaime Onate, Michael Kilgore, Jimmy Lam, Timothy W. Kueper, Dan Ye
  • Electrostatic chuck assembly with capacitive sense feature, and related operating method
    Patent number: 7558045
    Abstract: A semiconductor workpiece processing system for treating a workpiece, such as a semiconductor wafer, is provided. A related operating control method is also provided. The system includes an electrostatic chuck configured to receive a workpiece, and a clamping voltage power supply coupled to the electrostatic chuck. The electrostatic chuck has a clamping electrode assembly, and the clamping voltage power supply is coupled to the clamping electrode assembly. The clamping voltage power supply includes a direct current (DC) voltage generator configured to generate a DC clamping voltage for the clamping electrode assembly, an alternating current (AC) voltage generator configured to generate an AC excitation signal for the clamping electrode assembly, and a processing architecture coupled to the clamping electrode assembly.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: July 7, 2009
    Assignee: Novellus Systems, Inc.
    Inventors: Jaime Onate, Michael Kilgore, Jimmy Lam, Timothy W. Kueper, Dan Ye