Patents by Inventor Jairo Terra Moura
Jairo Terra Moura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11810801Abstract: A substrate transport apparatus includes a transport chamber, a drive section, a robot arm, an imaging system with a camera mounted through a mounting interface of the drive section in a predetermined location with respect to the transport chamber and disposed to image part of the arm, and a controller connected to the imaging system and configured to image, with the camera, the arm moving to or in the predetermined location, the controller effecting capture of a first image of the arm on registry of the arm proximate to or in the predetermined location, the controller is configured to calculate a positional variance of the arm from comparison of the first image with a calibration image of the arm, and determine a motion compensation factor changing an extended position of the arm. Each camera effecting capture of the first image is disposed inside the perimeter of the mounting interface.Type: GrantFiled: November 2, 2021Date of Patent: November 7, 2023Assignee: Brooks Automation US, LLCInventor: Jairo Terra Moura
-
Patent number: 11420337Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.Type: GrantFiled: February 11, 2020Date of Patent: August 23, 2022Assignee: Brooks Automation US, LLCInventors: Ulysses Gilchrist, Jairo Terra Moura
-
Publication number: 20220130696Abstract: A substrate transport apparatus includes a transport chamber, a drive section, a robot arm, an imaging system with a camera mounted through a mounting interface of the drive section in a predetermined location with respect to the transport chamber and disposed to image part of the arm, and a controller connected to the imaging system and configured to image, with the camera, the arm moving to or in the predetermined location, the controller effecting capture of a first image of the arm on registry of the arm proximate to or in the predetermined location, the controller is configured to calculate a positional variance of the arm from comparison of the first image with a calibration image of the arm, and determine a motion compensation factor changing an extended position of the arm. Each camera effecting capture of the first image is disposed inside the perimeter of the mounting interface.Type: ApplicationFiled: November 2, 2021Publication date: April 28, 2022Inventor: Jairo Terra Moura
-
Patent number: 11164769Abstract: A substrate transport apparatus includes a transport chamber, a drive section, a robot arm, an imaging system with a camera mounted through a mounting interface of the drive section in a predetermined location with respect to the transport chamber and disposed to image part of the arm, and a controller connected to the imaging system and configured to image, with the camera, the arm moving to or in the predetermined location, the controller effecting capture of a first image of the arm on registry of the arm proximate to or in the predetermined location, the controller is configured to calculate a positional variance of the arm from comparison of the first image with a calibration image of the arm, and determine a motion compensation factor changing an extended position of the arm. Each camera effecting capture of the first image is disposed inside the perimeter of the mounting interface.Type: GrantFiled: July 29, 2020Date of Patent: November 2, 2021Assignee: Brooks Automation, Inc.Inventor: Jairo Terra Moura
-
Publication number: 20210043484Abstract: A substrate transport apparatus includes a transport chamber, a drive section, a robot arm, an imaging system with a camera mounted through a mounting interface of the drive section in a predetermined location with respect to the transport chamber and disposed to image part of the arm, and a controller connected to the imaging system and configured to image, with the camera, the arm moving to or in the predetermined location, the controller effecting capture of a first image of the arm on registry of the arm proximate to or in the predetermined location, the controller is configured to calculate a positional variance of the arm from comparison of the first image with a calibration image of the arm, and determine a motion compensation factor changing an extended position of the arm. Each camera effecting capture of the first image is disposed inside the perimeter of the mounting interface.Type: ApplicationFiled: July 29, 2020Publication date: February 11, 2021Inventor: Jairo Terra MOURA
-
Publication number: 20200180163Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.Type: ApplicationFiled: February 11, 2020Publication date: June 11, 2020Inventors: Ulysses GILCHRIST, Jairo Terra MOURA
-
Patent number: 10556351Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.Type: GrantFiled: November 27, 2018Date of Patent: February 11, 2020Assignee: BROOKS AUTOMATION, INC.Inventors: Ulysses Gilchrist, Jairo Terra Moura
-
Publication number: 20190160690Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.Type: ApplicationFiled: November 27, 2018Publication date: May 30, 2019Inventors: Ulysses GILCHRIST, Jairo Terra MOURA
-
Patent number: 10137576Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.Type: GrantFiled: December 17, 2012Date of Patent: November 27, 2018Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Jairo Terra Moura
-
Patent number: 9752615Abstract: A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.Type: GrantFiled: June 27, 2007Date of Patent: September 5, 2017Assignee: Brooks Automation, Inc.Inventors: Martin Hosek, Jairo Terra Moura, Christopher Hofmeister
-
Patent number: 9024488Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.Type: GrantFiled: October 5, 2012Date of Patent: May 5, 2015Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Martin Hosek, Jairo Terra Moura, Jay Krishnasamy, Christopher Hofmeister
-
Publication number: 20140301818Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.Type: ApplicationFiled: December 17, 2012Publication date: October 9, 2014Applicant: Brooks Automation, Inc,Inventors: Ulysses Gilchrist, Jairo Terra Moura
-
Patent number: 8823294Abstract: A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.Type: GrantFiled: June 27, 2007Date of Patent: September 2, 2014Assignee: Brooks Automation, Inc.Inventors: Martin Hosek, Jairo Terra Moura, Christopher Hofmeister
-
Patent number: 8403619Abstract: In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.Type: GrantFiled: February 18, 2011Date of Patent: March 26, 2013Assignee: Brooks Automation, Inc.Inventors: Jairo Terra Moura, Martin Hosek, Todd Bottomley, Ulysses Gilchrist
-
Patent number: 8283813Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.Type: GrantFiled: June 27, 2008Date of Patent: October 9, 2012Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Martin Hosek, Jairo Terra Moura, Jay Krishnasamy, Christopher Hofmeister
-
Publication number: 20120045300Abstract: In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.Type: ApplicationFiled: February 18, 2011Publication date: February 23, 2012Applicant: Brooks Automation, IncInventors: Jairo Terra Moura, Martin Hosek, Todd Bottomley, Ulysses Gilchrist
-
Patent number: 7891936Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads.Type: GrantFiled: March 30, 2005Date of Patent: February 22, 2011Assignee: Brooks Automation, Inc.Inventors: Jairo Terra Moura, Martin Hosek, Todd Bottomley, Ulysses Gilchrist
-
Publication number: 20090243413Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.Type: ApplicationFiled: June 27, 2008Publication date: October 1, 2009Applicant: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Martin Hosek, Jairo Terra Moura, Jay Krishnasamy, Christopher Hofmeister
-
Publication number: 20090001907Abstract: A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.Type: ApplicationFiled: June 27, 2007Publication date: January 1, 2009Applicant: Brooks Automation, Inc.Inventors: Martin Hosek, Jairo Terra Moura, Christopher Hofmeister
-
Publication number: 20090001917Abstract: A method of commutating a motor includes operatively interfacing a stator and actuated component of the motor, arranging at least two winding sets relative to the actuated component, and independently controlling the at least two winding sets so that with the at least two winding sets the actuated component is both driven and centered.Type: ApplicationFiled: June 27, 2007Publication date: January 1, 2009Applicant: Brooks Automation, Inc.Inventors: Martin Hosek, Jairo Terra Moura, Christopher Hofmeister