Abstract: A distance measuring device in microscopy contains a sample stage for arranging a sample carrier in a sample plane, and at least one, preferably at least two illumination sources for providing measurement radiation, which is reflected at least proportionally at a surface of the sample carrier. The device also contains a detection optical unit for capturing an overview image and occurring reflections at the sample carrier present in the sample plane; a detector disposed downstream of the detection optical unit and serving for the spatially resolved capture of image data of the sample carrier and of occurring reflections; and an evaluation device for ascertaining at least a distance of the surface at at least one location of the sample carrier. The illumination sources emit the measurement radiation in each case at a divergent emission angle. A corresponding method can be used for ascertaining a spatial orientation of a sample carrier.

Abstract: The invention relates to a method for determining the thickness and refractive index of a layer (6) on a substrate (26). The layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26).

Abstract: A method is useful for generating an overview image using a high-aperture objective. An optical detection beam path with the objective is provided. The path is transferred into a second operating state via a first depth of field increased to a second depth of field. Detection radiation is captured in the second operating state. Detection radiation coming from the sample space is collected by the objective, guided along the path, and captured by a detector sensitive to detection radiation as an image with a lateral image field, which is the same in the first and second operating states.

Abstract: The invention relates to an illumination apparatus for a microscope, a microscope and a method for operating the illumination apparatus. The illumination apparatus has a sample space for holding a sample that is to be illuminated, and at least one laser light source. An objective for the directional emission of laser radiation of a first wavelength along a first optical axis that is directed into the sample space, and with a cover of the sample space by which the sample space is delimited at least on one of its sides. The cover further has a layer that is either impenetrable for the laser radiation over a blocking angle range of the illumination angle and is transmissive for radiation of a second wavelength over a transmitted light angle range, or has a controllable layer that, in a first control state, is transparent for radiation of the second wavelength and, in a second control state, is impenetrable for the laser radiation of the first wavelength.

Abstract: The invention relates to a method for determining the thickness and refractive index of a layer (6) on a substrate (26). The layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26).

Abstract: A method is useful for generating an overview image using a high-aperture objective. An optical detection beam path with the objective is provided. The path is transferred into a second operating state via a first depth of field increased to a second depth of field. Detection radiation is captured in the second operating state. Detection radiation coming from the sample space is collected by the objective, guided along the path, and captured by a detector sensitive to detection radiation as an image with a lateral image field, which is the same in the first and second operating states.

Abstract: A method and arrangement for acquiring image data, wherein a pixel area of a specimen to be imaged is illuminated in a plurality of illumination events with illumination light of a respective selected intensity, which intensities are different from one another. Subsequently, detection light emanating from the respective pixel area is acquired for each of the intensities as image data of a subpixel and resulting image data of the pixel area are determined from the number of acquired image data of the subpixels. According to the invention, the illumination events are triggered successively. The image data of all subpixels of the pixel area are acquired before a further pixel area is illuminated.

Abstract: The invention relates to an illumination apparatus for a microscope, a microscope and a method for operating the illumination apparatus. The illumination apparatus has a sample space for holding a sample that is to be illuminated, and at least one laser light source. An objective for the directional emission of laser radiation of a first wavelength along a first optical axis that is directed into the sample space, and with a cover of the sample space by which the sample space is delimited at least on one of its sides. The cover further has a layer that is either impenetrable for the laser radiation over a blocking angle range of the illumination angle and is transmissive for radiation of a second wavelength over a transmitted light angle range, or has a controllable layer that, in a first control state, is transparent for radiation of the second wavelength and, in a second control state, is impenetrable for the laser radiation of the first wavelength.

Abstract: A method and arrangement for acquiring image data, wherein a pixel area of a specimen to be imaged is illuminated in a plurality of illumination events with illumination light of a respective selected intensity, which intensities are different from one another. Subsequently, detection light emanating from the respective pixel area is acquired for each of the intensities as image data of a subpixel and resulting image data of the pixel area are determined from the number of acquired image data of the subpixels. According to the invention, the illumination events are triggered successively. The image data of all subpixels of the pixel area are acquired before a further pixel area is illuminated.