Patents by Inventor Jakob W. Neff

Jakob W. Neff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for generating EUV radiation or soft X-rays with enhanced efficiency
    Patent number: 8253123
    Abstract: The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to one or several surface(s) moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device at least two consecutive pulses (9, 18) are applied within a time interval of each electrical discharge onto said surface(s). With this measure, the collectable conversion efficiency is increased compared to the use of only one single energy pulse within each electrical discharge.
    Type: Grant
    Filed: December 9, 2009
    Date of Patent: August 28, 2012
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Jeroen Jonkers, Felix A. Kuepper, Harald E. Verbraak, Jakob W. Neff