Patents by Inventor Jakub Rybczynski

Jakub Rybczynski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210028046
    Abstract: Described are multi-layer electrostatic chucks used to secure and support a wafer substrate during wafer processing, and related methods, wherein the chuck includes a grounding structure that includes a grounding layer and a grounding pin.
    Type: Application
    Filed: July 24, 2020
    Publication date: January 28, 2021
    Inventors: Steven DONNELL, Jakub RYBCZYNSKI, Chun Wang CHAN, Yan LIU
  • Publication number: 20200161158
    Abstract: An electrostatic chuck solves the problem of wafer sticking by providing conductive paths on raised embossments that are bridged together and are connected to ground that support the wafer substrate above the surface of the electrostatic chuck. Further, laterally spaced electrode patterns and electrode elements which are spaced laterally and longitudinally away from the raised embossments reduce or eliminate electrical coupling during wafer clamping between conductively coated embossments and the electrode elements, thereby creating a low resistance path for charges remaining on the wafer after declamping to promptly travel to ground. The conductive bridge and electrode pattern configuration also substantially reduces or eliminates any charge build up on the conductive bridge(s) during clamping in order that charge build up in “islands” (worn portions of the insulator layer of the main field area) do not affect the charge dissipation from the wafer substrate through the conductive bridges to ground.
    Type: Application
    Filed: November 13, 2019
    Publication date: May 21, 2020
    Inventors: Yan LIU, Jakub RYBCZYNSKI, Steven DONNELL, Chun Wang CHAN
  • Patent number: 10497598
    Abstract: An electrostatic chuck includes a ceramic structural element, at least one electrode disposed on the ceramic structural element, and a surface dielectric layer disposed over the at least one electrode, the surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface dielectric layer comprises: (i) an insulator layer of amorphous alumina, of a thickness of less than about 5 microns, disposed over the at least one electrode; and (ii) a stack of dielectric layers disposed over the insulator layer. The stack of dielectric layers includes: (a) at least one dielectric layer including aluminum oxynitride; and (b) at least one dielectric layer including at least one of silicon oxide and silicon oxynitride.
    Type: Grant
    Filed: February 6, 2015
    Date of Patent: December 3, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Richard A. Cooke, Wolfram Neff, Carlo Waldfried, Jakub Rybczynski, Michael Hanagan, Wade Krull
  • Patent number: 9721821
    Abstract: In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
    Type: Grant
    Filed: October 29, 2013
    Date of Patent: August 1, 2017
    Assignee: Entegris, Inc.
    Inventors: I-Kuan Lin, Richard A. Cooke, Jakub Rybczynski
  • Publication number: 20160336210
    Abstract: An electrostatic chuck includes a ceramic structural element, at least one electrode disposed on the ceramic structural element, and a surface dielectric layer disposed over the at least one electrode, the surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck. The surface dielectric layer comprises: (i) an insulator layer of amorphous alumina, of a thickness of less than about 5 microns, disposed over the at least one electrode; and (ii) a stack of dielectric layers disposed over the insulator layer. The stack of dielectric layers includes: (a) at least one dielectric layer including aluminum oxynitride; and (b) at least one dielectric layer including at least one of silicon oxide and silicon oxynitride.
    Type: Application
    Filed: February 6, 2015
    Publication date: November 17, 2016
    Inventors: Richard A. Cooke, Wolfram Neff, Carlo Waldfried, Jakub Rybczynski, Michael Hanagan, Wade Krull
  • Publication number: 20150294891
    Abstract: In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
    Type: Application
    Filed: October 29, 2013
    Publication date: October 15, 2015
    Applicant: Entegris, Inc.
    Inventors: I-Kuan Lin, Richard A. Cooke, Jakub Rybczynski
  • Patent number: 8861170
    Abstract: In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: October 14, 2014
    Assignee: Entegris, Inc.
    Inventors: I-Kuan Lin, Richard A. Cooke, Jakub Rybczynski
  • Patent number: 8431816
    Abstract: An apparatus and methods for solar conversion using nanoscale cometal structures are disclosed herein. The cometal structures may be coaxial and coplanar. A nanoscale optics apparatus for use as a solar cell comprises a plurality of nanoscale cometal structures each including a photovoltaic material located between a first electrical conductor and a second electrical conductor. A method of fabricating solar cells comprises preparing a plurality of nanoscale planar structures; coating a plurality of planar surfaces of the plurality of planar structures with a photovoltaic semiconductor while leaving space between the plurality of planar surfaces; and coating the photovoltaic semiconductor with an outer electrical conductor layer, wherein a portion of the outer electrical conductor layer is located between the planar structures to form coplanar structures.
    Type: Grant
    Filed: April 22, 2011
    Date of Patent: April 30, 2013
    Assignee: The Trustees of Boston College
    Inventors: Krzysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Jakub A. Rybczynski
  • Publication number: 20110308564
    Abstract: An apparatus and methods for solar conversion using nanoscale cometal structures are disclosed herein. The cometal structures may be coaxial and coplanar. A nanoscale optics apparatus for use as a solar cell comprises a plurality of nanoscale cometal structures each including a photovoltaic material located between a first electrical conductor and a second electrical conductor. A method of fabricating solar cells comprises preparing a plurality of nanoscale planar structures; coating a plurality of planar surfaces of the plurality of planar structures with a photovoltaic semiconductor while leaving space between the plurality of planar surfaces; and coating the photovoltaic semiconductor with an outer electrical conductor layer, wherein a portion of the outer electrical conductor layer is located between the planar structures to form coplanar structures.
    Type: Application
    Filed: April 22, 2011
    Publication date: December 22, 2011
    Applicant: The Trustees of Boston College
    Inventors: Krzysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Jakub A. Rybczynski
  • Patent number: 7943847
    Abstract: An apparatus and methods for solar conversion using nanoscale cometal structures are disclosed herein. The cometal structures may be coaxial and coplanar. A nanoscale optics apparatus for use as a solar cell comprises a plurality of nanoscale cometal structures each including a photovoltaic material located between a first electrical conductor and a second electrical conductor. A method of fabricating solar cells comprises preparing a plurality of nanoscale planar structures; coating a plurality of planar surfaces of the plurality of planar structures with a photovoltaic semiconductor while leaving space between the plurality of planar surfaces; and coating the photovoltaic semiconductor with an outer electrical conductor layer, wherein a portion of the outer electrical conductor layer is located between the planar structures to form coplanar structures.
    Type: Grant
    Filed: August 24, 2006
    Date of Patent: May 17, 2011
    Assignee: The Trustees of Boston College
    Inventors: Krzysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Jakub A. Rybczynski
  • Patent number: 7754964
    Abstract: An apparatus and method for solar conversion using nanocoax structures are disclosed herein. A nano-optics apparatus for use as a solar cell comprising a plurality of nano-coaxial structures comprising an internal conductor surrounded by a semiconducting material coated with an outer conductor; a film having the plurality of nano-coaxial structures; and a protruding portion of the an internal conductor extending beyond a surface of the film. A method of fabricating a solar cell comprising: coating a substrate with a catalytic material; growing a plurality of carbon nanotubes as internal cores of nanocoax units on the substrate; oxidizing the substrate; coating with a semiconducting film; and filling with a metallic medium that wets the semiconducting film of the nanocoax units.
    Type: Grant
    Filed: April 10, 2006
    Date of Patent: July 13, 2010
    Assignee: The Trustees of Boston College
    Inventors: Krysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Yang Wang, Jakub A. Rybczynski
  • Patent number: 7649665
    Abstract: An apparatus and methods for optical switching using nanoscale optics are disclosed herein. A nano-optics apparatus for use as an optical switch includes a metallic film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material, the metallic film acting as an outer electrode; and an array of non-linear optical components penetrating the metallic film through the plurality of cylindrical channels, the array acting as an array of inner electrodes.
    Type: Grant
    Filed: August 24, 2006
    Date of Patent: January 19, 2010
    Assignee: The Trustees of Boston College
    Inventors: Krzysztof J. Kempa, Zhifeng Ren, Michael J. Naughton, Jakub A. Rybczynski
  • Patent number: 7634162
    Abstract: An apparatus and methods for nanolithography using nanoscale optics are disclosed herein. Submicron-scale structures may be obtained using standard photolithography systems with a de-magnifying lens. A de-magnifying lens for use in a standard photolithography system includes a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and an array of carbon nanotubes penetrating the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes.
    Type: Grant
    Filed: August 24, 2006
    Date of Patent: December 15, 2009
    Assignee: The Trustees of Boston College
    Inventors: Krzysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Jakub A. Rybczynski
  • Patent number: 7589880
    Abstract: An apparatus and methods for manipulating light using nanoscale cometal structures are disclosed. A nanoscale optics apparatus for manipulating light includes a plurality of nanoscale cometal structures each comprising a dielectric material located between a first electrical conductor and a second electrical conductor. A method of fabricating a nanoscale optics apparatus for manipulating light includes preparing a plurality of nanoscale planar structures; coating a plurality of planar surfaces of the plurality of planar structures with a dielectric while leaving space between the plurality of planar surfaces; and coating the dielectric with an outer electrical conductor layer, wherein a portion of the outer electrical conductor layer is located between the planar structures to form coplanar structures.
    Type: Grant
    Filed: August 24, 2006
    Date of Patent: September 15, 2009
    Assignee: The Trustees of Boston College
    Inventors: Krzysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Jakub A. Rybczynski
  • Publication number: 20070137697
    Abstract: An apparatus and methods for solar conversion using nanoscale cometal structures are disclosed herein. The cometal structures may be coaxial and coplanar. A nanoscale optics apparatus for use as a solar cell comprises a plurality of nanoscale cometal structures each including a photovoltaic material located between a first electrical conductor and a second electrical conductor. A method of fabricating solar cells comprises preparing a plurality of nanoscale planar structures; coating a plurality of planar surfaces of the plurality of planar structures with a photovoltaic semiconductor while leaving space between the plurality of planar surfaces; and coating the photovoltaic semiconductor with an outer electrical conductor layer, wherein a portion of the outer electrical conductor layer is located between the planar structures to form coplanar structures.
    Type: Application
    Filed: August 24, 2006
    Publication date: June 21, 2007
    Inventors: Krzysztof Kempa, Michael Naughton, Zhifeng Ren, Jakub Rybczynski
  • Publication number: 20070107103
    Abstract: An apparatus and methods for manipulating light using nanoscale cometal structures are disclosed. A nanoscale optics apparatus for manipulating light includes a plurality of nanoscale cometal structures each comprising a dielectric material located between a first electrical conductor and a second electrical conductor. A method of fabricating a nanoscale optics apparatus for manipulating light includes preparing a plurality of nanoscale planar structures; coating a plurality of planar surfaces of the plurality of planar structures with a dielectric while leaving space between the plurality of planar surfaces; and coating the dielectric with an outer electrical conductor layer, wherein a portion of the outer electrical conductor layer is located between the planar structures to form coplanar structures.
    Type: Application
    Filed: August 24, 2006
    Publication date: May 10, 2007
    Inventors: Krzysztof Kempa, Michael Naughton, Zhifeng Ren, Jakub Rybczynski
  • Publication number: 20070105240
    Abstract: An apparatus and methods for nanolithography using nanoscale optics are disclosed herein. Submicron-scale structures may be obtained using standard photolithography systems with a de-magnifying lens. A de-magnifying lens for use in a standard photolithography system includes a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and an array of carbon nanotubes penetrating the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes.
    Type: Application
    Filed: August 24, 2006
    Publication date: May 10, 2007
    Inventors: Krzysztof Kempa, Michael Naughton, Zhifeng Ren, Jakub Rybczynski
  • Publication number: 20070081242
    Abstract: An apparatus and methods for optical switching using nanoscale optics are disclosed herein. A nano-optics apparatus for use as an optical switch includes a metallic film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material, the metallic film acting as an outer electrode; and an array of non-linear optical components penetrating the metallic film through the plurality of cylindrical channels, the array acting as an array of inner electrodes.
    Type: Application
    Filed: August 24, 2006
    Publication date: April 12, 2007
    Inventors: Krzysztof Kempa, Zhifeng Ren, Michael Naughton, Jakub Rybczynski
  • Publication number: 20070047056
    Abstract: An apparatus and method for solar conversion using nanocoax structures are disclosed herein. A nano-optics apparatus for use as a solar cell comprising a plurality of nano-coaxial structures comprising an internal conductor surrounded by a semiconducting material coated with an outer conductor; a film having the plurality of nano-coaxial structures; and a protruding portion of the an internal conductor extending beyond a surface of the film. A method of fabricating a solar cell comprising: coating a substrate with a catalytic material; growing a plurality of carbon nanotubes as internal cores of nanocoax units on the substrate; oxidizing the substrate; coating with a semiconducting film; and filling with a metallic medium that wets the semiconducting film of the nanocoax units.
    Type: Application
    Filed: April 10, 2006
    Publication date: March 1, 2007
    Inventors: Krzysztof Kempa, Michael Naughton, Zhifeng Ren, Yang Wang, Jakub Rybczynski