Patents by Inventor Jalel Hamila

Jalel Hamila has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for cleaning a semiconductor wafer processing system
    Patent number: 6715496
    Abstract: A method and apparatus for cleaning a semiconductor wafer processing system comprising a turbomolecular pump. In one embodiment, the invention may be reduced to practice by first supplying a cleaning agent to a chamber; pumping the cleaning agent from the chamber through an the exhaust port; at least partially opening a gate valve; and drawing at least a portion of the cleaning agent through the gate valve and into the turbomolecular pump.
    Type: Grant
    Filed: April 3, 2003
    Date of Patent: April 6, 2004
    Assignee: Applied Materials Inc.
    Inventors: Michael Chiu Kwan, Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan
  • Method and apparatus for cleaning a semiconductor wafer processing system
    Publication number: 20030164224
    Abstract: A method and apparatus for cleaning a semiconductor wafer processing system comprising a turbomolecular pump. In one embodiment, the invention may be reduced to practice by first supplying a cleaning agent to a chamber; pumping the cleaning agent from the chamber through an the exhaust port; at least partially opening a gate valve; and drawing at least a portion of the cleaning agent through the gate valve and into the turbomolecular pump.
    Type: Application
    Filed: April 3, 2003
    Publication date: September 4, 2003
    Inventors: Michael Chiu Kwan, Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan
  • Method and apparatus for cleaning a semiconductor wafer processing system
    Patent number: 6596123
    Abstract: A method and apparatus for cleaning a semiconductor wafer processing system comprising a turbomolecular pump. In one embodiment, the invention may be reduced to practice by first supplying a cleaning agent to a chamber; pumping the cleaning agent from the chamber through an the exhaust port; at least partially opening a gate valve; and drawing at least a portion of the cleaning agent through the gate valve and into the turbomolecular pump.
    Type: Grant
    Filed: January 28, 2000
    Date of Patent: July 22, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Michael Chiu Kwan, Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan