Abstract: A method of grinding an ingot for use in manufacturing a semiconductor or solar wafer is disclosed. The method includes providing an ingot including four flat sides and four rounded corner portions, each corner portion extending between an adjacent pair of the flat sides, and grinding a plurality of planar facets on each corner portion, each planar facet of the corner portion joined to an adjacent facet at a juncture and oriented such that each corner portion has a substantially arcuate shape. A wafer and ingot are also disclosed.

Abstract: A method of grinding an ingot for use in manufacturing a semiconductor or solar wafer is disclosed. The method includes providing an ingot including four flat sides and four rounded corner portions, each corner portion extending between an adjacent pair of the flat sides, and grinding a plurality of planar facets on each corner portion, each planar facet of the corner portion joined to an adjacent facet at a juncture and oriented such that each corner portion has a substantially arcuate shape. A wafer and ingot are also disclosed.

Abstract: A method of grinding an ingot for use in manufacturing a semiconductor or solar wafer is disclosed. The method includes providing an ingot including four flat sides and four rounded corner portions, each corner portion extending between an adjacent pair of the flat sides, and grinding a plurality of planar facets on each corner portion, each planar facet of the corner portion joined to an adjacent facet at a juncture and oriented such that each corner portion has a substantially arcuate shape. A wafer and ingot are also disclosed.

Abstract: A multipressure plenum system for supporting a conveyor belt of a gas supported belt conveyor and method of operation. The multipressure plenum system includes a multipressure plenum having a support surface including a plurality of apertures and a chamber in fluid communication with the apertures. The chamber of the plenum is in selective fluid communication with a first source of gas at a first pressure, and is in selective fluid communication with a second source of gas at a second pressure. Gas from the first source of gas at the first pressure flows through the apertures in the plenum to form a gas cushion which supports the conveyor belt above the plenum. Gas from the second source of gas at the second pressure selectively flows through the apertures in the plenum to provide additional support to the conveyor belt.

Abstract: A multipressure plenum system for supporting a conveyor belt of a gas supported belt conveyor and method of operation. The multipressure plenum system includes a multipressure plenum having a support surface including a plurality of apertures and a chamber in fluid communication with the apertures. The chamber of the plenum is in selective fluid communication with a first source of gas at a first pressure, and is in selective fluid communication with a second source of gas at a second pressure. Gas from the first source of gas at the first pressure flows through the apertures in the plenum to form a gas cushion which supports the conveyor belt above the plenum. Gas from the second source of gas at the second pressure selectively flows through the apertures in the plenum to provide additional support to the conveyor belt.

Abstract: The invention provides a polishing disk comprising (a) a body comprising a front surface, a back surface, and a peripheral surface, (b) a polishing surface, (c) an end-point detection port extending through the body from the front surface to the back surface, and (d) a drainage channel in fluid communication with the end-point detection port. The invention further provides a method of preparing such a polishing disk and a method of polishing a substrate with such a polishing disk.

Abstract: The invention provides a polishing disk comprising (a) a body comprising a front surface, a back surface, and a peripheral surface, (b) a polishing surface, (c) an end-point detection port extending through the body from the front surface to the back surface, and (d) a drainage channel in fluid communication with the end-point detection port. The invention further provides a method of preparing such a polishing disk and a method of polishing a substrate with such a polishing disk.

Abstract: A portable, sequential air sampler having an easily transportable housing containing therein a plurality of interrelated components which allow the air sampler to operate by either battery or "line" power as well as maintain the flow rate through the sampling media substantially constant. The components include a vacuum pump and rotary valve which are capable of sequentially drawing air through the sampling media. In addition, a flow rate control system is operably connected to the vacuum pump in order to maintain the substantially constant flow rate through the sampling media. The air sampler can vary initiation of the sampling operation from 1-999 minutes while varying the sequence of sampling from 1-99 minutes, and, yet, maintai substantially constant air flow throughout the air sampling procedure.