Abstract: A method and system for forming a focused image on an image plane of a diffraction range finder with a variable pitch diffraction grating. Diffracted light is propagated through a lens and slit assembly and onto an image plane of a camera, the diffracted light having been diffracted by the variable pitch diffraction grating. The lens and slit assembly includes lens elements and a slit. The slit is surrounded by opaque material that is opaque to the diffracted light passing through the slit. The slit has a shape characterized by a long dimension and a short dimension that is shorter than the long dimension.

Abstract: A method and system for forming a focused image on an image plane of a diffraction range finder with a variable pitch diffraction grating. Diffracted light is propagated through a lens and slit assembly and onto an image plane of a camera, the diffracted light having been diffracted by the variable pitch diffraction grating. The lens and slit assembly includes lens elements and a slit. The slit is surrounded by opaque material that is opaque to the diffracted light passing through the slit. The slit has a shape characterized by a long dimension and a short dimension that is shorter than the long dimension.

Abstract: A backscattering spectrometry method and device for identifying and quantifying impurities in a workpiece during processing and manufacturing of that workpiece. While the workpiece is implanted with an ion beam, that same ion beam backscatters resulting from collisions with known atoms and with impurities within the workpiece. Those ions backscatter along a predetermined scattering angle and are filtered using a self-supporting filter to stop the ions with a lower energy because they collided with the known atoms of the workpiece of a smaller mass. Those ions which pass through the filter have a greater energy resulting from impact with impurities having a greater mass than the known atoms of the workpiece. A detector counts the number and measures the energy of the ions which pass through the filter.