Patents by Inventor James B. Hollingsworth

James B. Hollingsworth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for controlling the temperature and uniformity of a wafer during a SIMOX implantation process
    Patent number: 5440132
    Abstract: An implantation system (10) is provided that comprises a rotating drum (12) which holds a wafer chuck (28) which in turn holds a semiconductor wafer (26). The wafer chuck (28) rotates during the implantation of oxygen from an oxygen beam (24) created by a beam generator (22). The wafer chuck (28) is rotated via shaft (30) from a motor (32). The wafer chuck (28) also holds a thermal reflector (36) which allows for control of the temperature of the wafer during the implantation process.
    Type: Grant
    Filed: March 30, 1994
    Date of Patent: August 8, 1995
    Assignee: Texas Instruments Incorporated
    Inventors: Keith A. Joyner, James B. Hollingsworth