Abstract: The present invention is directed to systems and methods for assisting personnel in discerning which side of a dummy wafer has been polished more and for differentiating one side of a dummy wafer from the other. In a preferred embodiment, dummy wafers include a first plurality of depth indicia on a first surface and a second plurality of depth indicia on a second opposing surface. In one embodiment, each of the depth indicia of the first plurality of depth indicia extends a depth into the dummy wafer beyond the first surface, and each of the depth indicia of the second plurality of depth indicia extends a depth into the dummy wafer beyond the second surface. Other embodiments include depth indicia of the first plurality of depth indicia located at depths beyond the first surface that each have a corresponding depth indicia in the second plurality of depth indicia located at a substantially similar depth beyond the second surface.

Abstract: A system and method for semiconductor processing using magnetorheological finishing (MRF) includes polishing of semiconductor substrates, ceramic bodies and glass lithography masks, to a high degree of flatness by the abrasive action of a magnetorheological fluid flowing in a magnetic field.