Abstract: A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.

Abstract: A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.

Abstract: A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.

Abstract: A method and apparatus for removing a pellicle from a photomask wherein the adhesive between the pellicle frame and photomask is cooled sufficiently to allow the adhesive property of the adhesive to diminish to the point where the adhesive will release from the photomask with little or no mechanical force and leaving minimal adhesive on the photomask. The adhesive is cooled by way of manifolds containing coolant being brought in contact with the pellicle frame or by way of a coolant spray nozzles spraying coolant directly onto the pellicle frame.

Abstract: A method and system includes the accurate positioning of a sample in a multi-axis range of motion. In a preferred embodiment, the present invention enables this movement by combining coarse and fine motion stages. By using a combination of stages and precise measuring means, normal and typical errors are significantly reduced.

Abstract: The present invention is a game and table for playing table tennis with six players simultaneously. Each side of the table includes a pair of lobes formed by angled edges, having arcuate edges and being arranged on either side of a central region that defines a playing surface upon which a central player or center plays. Wingmen stand behind the arcuate edges and play on either side of the center.

Abstract: The present invention is a game and table for playing table tennis with six players simultaneously. Each side of the table includes a pair of lobes formed by angled edges, having arcuate edges and being arranged on either side of a central region that defines a playing surface upon which a central player or center plays. Wingmen stand behind the arcuate edges and play on either side of the center.